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Rigaku Enters Strategic Alliance with Onto Innovation through 27 % Equity Investment

TOKYO, April 20, 2026--Rigaku Holdings Corporation (headquarters: Akishima, Tokyo; President and CEO: Jun Kawakami; "Rigaku"), a global leader in X-ray analytical technologies, today announced that it has entered into a strategic capital and business alliance with Onto Innovation Inc. (headquarters: Massachusetts, USA; CEO: Michael P. Plisinski; "Onto Innovation").

articleRigaku Holdings CorporationApril 20, 20264/company/rigaku-holdings-corporation/news/rigaku-enters-strategic-alliance-with-onto-innovation-through-27-percent-equity-investment
Rigaku Enters Strategic Alliance with Onto Innovation through 27 % Equity Investment

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Rigaku Holdings Corporationsemiconductor devicesoptical metrologyOnto Innovation Inc.Innovationprocess controlmetrology solutionsMichael P. PlisinskiRigakusemiconductor production