SiTime Corporation · NASDAQ:SITM

SiTime — Technical Presentation (July 2013)

14 slides from SiTime's technical presentation, Jul 29, 2013

  1. Slide 1: SiTime MEMS Advantages

    SiTime University Turbo Seminar Series July 29-30 2013 SiTime MEMS Advantages

  2. Slide 2: Agenda

    Agenda • Benefits of SiTime’s MEMS Fabrication Process • Advantages of Silicon MEMS • Design for High Q and low Stress Sensitivity • Best Resistance to Shock and Vibration • World Class Reliability 2

  3. Slide 3: Silicon MEMS is Best for High Volume

    Silicon MEMS is Best for High Volume Silicon MEMS Quartz High volume, multi-sourced, scalable Complex, single-sourced • Capital-Lite • Capital intensive • Standard fabs • Specialized lines by package • TSMC, Bosch, Tower-Jazz • Scale only by adding factories • Plastic packages, multi-sourced • Ceram

  4. Slide 4: Advantages of Single Crystal Silicon Resonators

    Advantages of Single Crystal Silicon Resonators • Single Crystal Silicon resonators are compatible with standard CMOS processing • Enables fabless models and massive production scaling • Moore’s law advantage • Single Crystal Silicon resonators can withstand very high encapsulation temperatures • El

  5. Slide 5: Advantages of Single Crystal Silicon Resonators

    Advantages of Single Crystal Silicon Resonators • EpiSeal Encapsulated single crystal silicon resonators do not drift • Other technologies require the use of metals, amorphous materials, polycrystalline materials, and epoxies. • Introducing other materials may cause fatigue or stress relaxation lead

  6. Slide 6: Design of Resonators for Best Performance: Stress

    Design of Resonators for Best Performance: Stress • Anchor placement minimizes stress sensitivity • Mechanical coupling between anchor and resonator reduces stress effects • Resonator system design corrects for stress 6

  7. Slide 7: Design of Resonators for Best Performance: Optimizing Q

    Design of Resonators for Best Performance: Optimizing Q • Resonator design adjusted to minimize Thermal Elastic Dissipation (TED) • Resonator design adjusted to minimize Anchor Losses • In-plane definition of features allows SiTime to tailor connection to anchors – difficult to achieve in quartz (ep

  8. Slide 8: MEMS Oscillators are Inherently Robust Against Shock & Vibration

    SiTime MEMS Oscillators are Inherently Robust Against Shock & Vibration Proprietary Design • Our Resonators are Designed Specifically for Low Sensitivity to Any External Mechanical Acceleration • Single-Point, Center Anchored MEMS Resonator Virtually Eliminates Stress Error Sources 5 MHz 524 kHz 48

  9. Slide 9: MEMS Oscillators are Inherently Robust Against Shock & Vibration

    SiTime MEMS Oscillators are Inherently Robust Against Shock & Vibration The resonator moving mass is extremely small  Large acceleration needed to cause sufficiently large force SiTime MEMS Resonator Mass is 1000-to-3000 Times Smaller Than Quartz! Silicon MEMS Resonator Mass Quartz Resonator Mass V

  10. Slide 10: MEMS Oscillators are Inherently Robust Against Shock & Vibration

    SiTime MEMS Oscillators are Inherently Robust Against Shock & Vibration The resonator structure operates like a very stiff spring Very difficult to affect through external force. >1M g needed before resonator touches any surfaces. 55,000 times greater than a Howitzer Cannon! Howitzer Cannon Launche

  11. Slide 11: MEMS are Insensitive to Vibration

    SiTime MEMS are Insensitive to Vibration Vibration Sensitivity vs. Frequency SiTime TXC Epson Conner Winfield Kyocera SiLabs 100.00 Vibration Sensitivity (ppb/g) 10.00 Up to 200x 1.00 Better Performance SiTime 0.10 10 100 1000 Vibration Frequency (Hz) ppb/g error is calculated from the measured phas

  12. Slide 12: Best Quality and Reliability: Leveraging Outstanding Design, Materials, and Processes

    Best Quality and Reliability: Leveraging Outstanding Design, Materials, and Processes Metric Actual 0.14 DPPM DPPM based on Customer Returns Based on 150 Million Units Shipped Below 100 DPPM is World Class 2 FIT FIT 500 Million Hours 15x Better than Quartz 12

  13. Slide 13: Summary

    Summary • Best High Volume Manufacturing Because… • Leverages existing CMOS manufacturing equipment and processes • No investment in customized manufacturing line • Best in Performance Because… • Single Crystal Silicon is a superior performing material • Resonators are designed for low stress sensit

  14. Slide 14: Contact Information

    Contact Information • For Questions, contact SiTime Technical Support Technicalsupport@sitime.com • For Turbo Webinar pdf Downloads on SiTime’s Web Site www.sitime.com/support/sitime-u/turbo-webinars • All new webinars will be posted within 1-week • For a list of part numbers used for each test, con

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