Slide 1: Company Introduction
COMPANY INTRODUCTION NASDAQ: ASYS March 2026
Slide 2: Enabling AI Semiconductor Device Packaging and Advanced Substrate Fabrication
Enabling AI Semiconductor Device Packaging and Advanced Substrate Fabrication Business Transformation to Deliver Profitable Growth
Slide 3: Safe Harbor Statement
Safe Harbor Statement This Presentation may contain certain statements or information that constitute “forward-looking statements” (as such term is defined in Section 27A of the Securities Act of 1933, as amended, and Section 21E of the Securities Exchange Act of 1934, as amended, and the Private Se
Slide 4: Amtech Divisions
Amtech Divisions Capital equipment and consumables for semiconductor fabrication and packaging Thermal Semiconductor Processing Fabrication Solutions Solutions (~70%) (~30%) Lapping, Polishing, Reflow Oven Belt Furnace CMP Parts & Upgrades & Cleaning Consumables Advanced packaging & electronics asse
Slide 5: Optimized Operations Model Shows Positive Impact in Recent Quarters
Optimized Cash Generation (M$) Operations Model 12 Shows Positive 10 Optimization efforts delivered annualized savings of $13M, breakeven reduced from about $120M to about $75M Impact in Recent 8 Quarters 6 4 2 0 Q2'24 Q3'24 Q4'24 Q1'25 Q2'25 Q3'25 Q4'25 Q1'26 -2 -4 Adj. EBITDA (TTM) Cash Provided b
Slide 6: AI Driving Revenue Growth in Thermal Processing Solutions Segment
AI Driving Revenue Growth in Thermal Processing Solutions Segment High Performance Reflow for Die-Level Packaging (“on Substrate”) Flip chip packaging 2.5D packaging CoWoS packaging Panel packaging Advanced Chip Packaging Optical packaging & Assembly Server board SMT TrueFlat Thin Substrate Reflow O
Slide 7: Leveraging CMP Foundry Service to grow Chemical Consumables business
Leveraging CMP Foundry Service to grow Chemical Consumables business • CMP Foundry serves as a process development center for early- stage semiconductor and photonics companies. • Enables rapid development and validation of CMP processes for advanced materials including Si, SiC, III-V, and photonic
Slide 8: Supplying Essential Semiconductor Equipment and Materials
I N V E S T M E N T O P P O R T U N I T Y Supplying Essential Semiconductor Equipment and Materials Increasing Cash Flow Generation and Creating Strong Operating Leverage to Deliver Profitable Growth Driven by AI Infrastructure and e-Mobility Markets OPERATING LEVERAGE CASH FLOW GENERATION HARNESS G
Slide 9: Fiscal Year 2026 First Quarter Financial Results
Fiscal Year 2026 First Quarter First Quarter Fiscal 2026 Financial and Operational Highlights Financial Results • Net revenue of $19.0 million • Cash of $22.1 million AI Product Demand Continues to be • Cash provided by operations of $4.1 million Strong • GAAP net income of $0.1 million Quarterly Or
Slide 10: 2026 Second Quarter Guidance
OUTLOOK 2026 Second • Revenues $19.0 – 21.0 Million Quarter Guidance (period end 3/31/26) • Adjusted EBITDA margin in high single digits range • NOL valued at $74.3 million at 9/30/25 10
Slide 11: Reconciliation of GAAP to Non-GAAP Financial Measures
AMTECH SYSTEMS, INC. (NASDAQ: ASYS) (Unaudited) Reconciliation of GAAP to Non-GAAP Financial Measures (in thousands, except per share data) Three Months Ended December 31, September 30, December 31, 2025 2025 2024 Amtech Systems, Inc. Gross Profit: GAAP gross profit $ 8,493 $ 8,813 $ 9,363 Write-dow
Slide 12: Reconciliation of GAAP to Non-GAAP Financial Measures
AMTECH SYSTEMS, INC. (NASDAQ: ASYS) (Unaudited) Reconciliation of GAAP to Non-GAAP Financial Measures (in thousands, except per share data) Three Months Ended December 31, September 30, December 31, 2025 2025 2024 Consolidated Net Income: GAAP net income $ 108 $ 1,068 $ 312 Amortization of acquired
Slide 13: Reconciliation of Net Income to EBITDA and Adjusted EBITDA
AMTECH SYSTEMS, INC. (NASDAQ: ASYS) (Unaudited) Reconciliation of Net Income to EBITDA and Adjusted EBITDA (in thousands, except per share data) Three Months Ended December 31, 2025 Amtech Systems, Inc. EBITDA: GAAP net income $ 108 Interest income (115 ) Interest expense 7 Income tax provision 581