Ebara Corporation · TSE:6361

Ebara — Investor Day (December 2023)

24 slides from Ebara's investor day presentation, Dec 4, 2023

  1. Slide 1: EBARA IR Day 2023: Precision Machinery Company Medium and Long-term Business Strategy

    EBARA IR Day 2023 Precision Machinery Company Medium and Long-term Business Strategy December 4, 2023 Masao Hodai Executive Officer, Chief Operating Officer, Precision Machinery Company

  2. Slide 2: Precision Machinery Company Overview

    Precision Machinery Company Overview Our Company's Basic Policies We apply the world's highest level of technology and support towards providing solutions for the manufacturing processes and sub-fab areas that support semiconductor miniaturization and sophistication to offer new value toward the evo

  3. Slide 3: Ebara Products Are Widely Used in Semiconductor Factories

    Ebara Products Are Widely Used in Semiconductor Factories Cooling tower 2F (clean room) Devices to manufacture semiconductors CMP systems Bevel polishing systems Plating system Plating system Bevel polishing system Devicesto assistmanufacturing equipment CMP system 1F (sub-fab) Dry vacuum pumps Gas

  4. Slide 4: Precision Machinery Company Results (Consolidated)

    Precision Machinery Company Results (Consolidated) Revenue (unit: billion yen) 250.0 : Operating profit ratio 250.0 CMP business 35.0% CAGR:18% - Global No. 2 share for CMP systems 222.2 - Maintaining significant business growth thanks to increasing demand for semiconductor miniaturization and growi

  5. Slide 5: Growth Strategy for the Precision Machinery Company

    Growth Strategy for the Precision Machinery Company Long-term vision Business Contribute to the development of society through partnerships and distinctive technologies centered on the E-Vision 2030 Vision semiconductor field while helping create a more enriched world through endeavors in new fields

  6. Slide 6: Precision Machinery Company Global Network

    Precision Machinery Company Global Network Europe China USA HEFEI EBARA PRECISION Xian Ebara Precision Shanghai Ebara Precision MACHINERY CO., LTD. Machinery Co., Ltd. Machinery Co., Ltd. Ebara Technologies Incorporated Ebara Precision ● Machinery Europe ● GmbH Japan ● ● ● ● ● ● ● ● ● ● ● ● ● Fujisa

  7. Slide 7: Opportunities for Future Business Growth

    Opportunities for Future Business Growth Growth in IoT, Cloud, AI, Automated Car, 5G (ICAC5), Semiconductor miniaturization shifts from nm to Å DX, and GX will continue to drive rapid growth in semiconductor demand Smart Vehicles phone (autonomous driving) PCs/tablets 5G Data centers Servers AI IoT

  8. Slide 8: EBARA IR Day 2023: Evolution of Semiconductor Manufacturing Technology and CMP

    EBARA IR Day 2023 Evolution of Semiconductor Manufacturing Technology, Trends and Medium- to Long-term Strategies for CMP Processing Technology December 4, 2023 Isao Nambu Executive Officer, Division Executive, Equipment Division, Precision Machinery Company

  9. Slide 9: CMP Business Overview

    CMP Business Overview 2022 52% CMP market scope *3 About Chemical Mechanical Polishing (CMP) - A process for chemically and mechanically polishing wafers (semiconductor substrates) to achieve the nanometer*1-level flatness required in the semiconductor manufacturing process. *1 1 nanometer is one mi

  10. Slide 10: Strategy for Major CMP Processes

    Strategy for Major CMP Processes Logic Memory Fusion bonding Front side Hybrid bonding logic pattern Increase Metal Major processes Back side (W/Cu) Increase Metal(Cu) (Layer image diagram) power line layers Increase Metal/Non-Metal layers DRAM HBM (Example: Backside Power Delivery Network (BS-PDN))

  11. Slide 11: Strengthen Product and Solution Development Capabilities (CMP)

    Growth Strategy for the CMP Business - Strengthen Product and Solution Development Capabilities - E-Vision2030 E-Plan2025 Semiconductor Miniaturization - Aim for 14Å Strengthen product and solution development capabilities ◼ Building a market-in solution development system ◼ Enhancing research and d

  12. Slide 12: Increase Production Capacity (CMP)

    Growth Strategy for the CMP Business - Increase Production Capacity - Construction of a new CMP production building K3 building (scheduled for completion in 2024) (scheduled for completion in 2024) ◼ Started construction of a new production building (K3) in Kumamoto District to respond to medium- to

  13. Slide 13: EBARA IR Day 2023: Component Products, Sub-fab Solutions, Green Technology

    EBARA IR Day 2023 Component Products, Sub-fab Solutions, Green Technology December 4, 2023 Seiichi Tsuyuki Executive Officer, Division Executive, Components Division, Precision Machinery Company

  14. Slide 14: Components Business Overview

    Components Business Overview 2022 46% Components business product line - Providing value and solutions to "Sub-fab" areas downstream of clean rooms in semiconductor factories A non-contact vacuum pump that does not use oil or - Total shipments of dry vacuum pumps reached Dry vacuum pumps liquid for

  15. Slide 15: Installation Environment for Components Business Products

    Installation Environment for Components Business Products inside Semiconductor Factories ◼ Vacuum products that create a vacuum environment in semiconductor manufacturing equipment and products that detoxify process gases ◼ Supplies ozone water for the cooling chillers and wafer cleaning systems of

  16. Slide 16: Strengthen Product and Solution Development Capabilities (Components)

    Growth Strategy for the Components Business - Strengthen Product and Solution Development Capabilities - Using component product integration to transform into an exhaust system solutions provider 1. Value-added solutions for the entire sub-fab area at semiconductor plants 2. Using green technology t

  17. Slide 17: Value-added Solutions for the Entire Sub-fab Area

    Growth Strategy for the Components Business - Strengthen Product and Solution Development Capabilities - 1. Value-added solutions for the entire sub-fab area ◼ Proposals for packaging multiple products and exhaust systems including piping, valves, and heaters - Eliminates the need for customers to d

  18. Slide 18: Using Green Technology to Reduce Environmental Impact and Running Costs

    Growth Strategy for the Components Business - Strengthen Product and Solution Development Capabilities - 2. Using green technology to reduce customer environmental impact and running costs ◼ Strengthening efforts to reduce the environmental impact Semiconductor growth of the semiconductor industry a

  19. Slide 19: Responding to Technological Advances in Semiconductor Manufacturing

    Growth Strategy for the Components Business - Strengthen Product and Solution Development Capabilities - 3. Responding to technological advances in semiconductor manufacturing processes Changes in demand due to technological advances Our Strategy ◼ Adoption of new materials and gases in film deposit

  20. Slide 20: New Products for the Semiconductor Market

    Growth Strategy for the Components Business - Strengthen Product and Solution Development Capabilities - ◼ New products for the semiconductor market - Pursuing durability against reaction by-products and corrosion, and energy/footprint savings - Achieve both improved production efficiency and decarb

  21. Slide 21: Expansion into Industrial Areas Beyond Semiconductors

    Growth Strategy for the Components Business - Strengthen Product and Solution Development Capabilities - 4. Expansion into industrial areas beyond semiconductors, LEDs, LCDs, and solar cells ◼ Oil rotary pumps have been used in liquid chromatograph mass spectrometers (LC-MS) for many years, but in r

  22. Slide 22: Increase Production Capacity: V7 Automated Plant

    Growth Strategy for the Components Business - Increase Production Capacity - ◼ V7 automated plant - Completed in 2019, production started in 2020 • Early adopter of production automation technology using robots and IoT to strive for the highest quality and address future labor shortages • Integrated

  23. Slide 23: Increase Production Capacity: Dry Vacuum Pump Plants

    Growth Strategy for the Components Business - Increase Production Capacity - ◼ Aiming for No. 1 share in dry pump market by 2030, increasing finished product assembly and overhaul capabilities ◼ Continued investment in automation at V7 automated plant (Fujisawa), which started operations in 2020 Con

  24. Slide 24: Disclaimer

    Disclaimer: This release contains forward-looking statements which involve certain risks and uncertainties that could cause actual results to differ materially from those projected. Readers are cautioned not to place undue reliance on these forward-looking statements which are valid only as of the d

Ebara — Investor Day (December 2023) on 6ix