Cvd Equipment Corporation · NASDAQ:CVV
Cvd Equipment — Graphene Live 2014
30 slides from Cvd Equipment's conference presentation, 2014
Slide 1: Cost efficient Scale-Up of CVD graphene, CVD films and Nanomaterials
Cost efficient Scale-Up of CVD graphene, CVD films and Nanomaterials Karlheinz Strobl, Mathieu Monville, Riju Singhal, Samuel Wright, and Leonard Rosenbaum 1
Slide 2: Safe Harbor Statement
Safe Harbor Statement Certain statements in the following presentation relate to future results that are forward looking statements as defined in the Private Securities Litigation Reform Act of 1995. Actual results may differ materially from those projected as a result of certain risks and uncertain
Slide 3: Operations and Manufacturing
Operations and Manufacturing Operations ● Headquarters in Central Islip, NY ● Additional facility in Saugerties, NY ● 190 employees ● Recently moved into a 130,000 square foot company owned facility increasing Company owned facilities to a total of 152,000 square feet Sales - Worldwide ● Direct sa
Slide 4: CVD = Chemical Vapor Deposition
CVD = Chemical Vapor Deposition = Chemistry + Temperature + Pressure Control Chemical Vapor Deposition is the controlled DECOMPOSITION of gases used to DEPOSIT a material onto a surface Requires multidisciplinary design of the process chamber, precise control of process gas flows, temperatures and p
Slide 5: We Sell CUSTOM CVD Systems for Research and Production
We Sell CUSTOM CVD Systems for Research and Production First Nano Systems for Research ● EasyTube® ● EasyGasTM ● EasyExhaustTM CVD Systems for Production ● Photovoltaic ● Transparent Conductive Oxide (TCO) ● Reel-to-Reel CVD deposition ● Liquid Phase Epitaxial Deposition ● Medical Components ● Aeros
Slide 6: Commercialization of Nano-Structured Materials
Commercialization of Nano-Structured Materials Commercialization Volume production Pilot production R&D Invention Need 6
Slide 7: CVD Equipment Corporation
CVD Equipment Corporation Designs and manufactures both Standard and Configurable R&D, Pilot & Production chemical vapor deposition systems Operates also an Application Laboratory: • Performs Contract Process Development • Develops Process and Equipment for Research Materials • Works with Researcher
Slide 8: Novel NanotoMacro Manufacturing Platform
Novel NanotoMacro™ Manufacturing Platform OPTIMIZED FOR: thickness 3D graphene, carbon-derived-carbons, NanotoMacro™ surface density hollow carbon structures, etc. 3D Manufacturing density Nano platelets: graphene Platform electrical conductivity vermiculite, thermal conductivity clay 2D BN, MoS2… s
Slide 9: How to get to a Universal CVD Graphene Manufacturing Solution
How to get to a UNIVERSAL Low cost, High Volume, High or higher Quality CVD Graphene Manufacturing Solution! Foam Wide range of CVD growth Substrates in use today • Materials (Cu, Ni, Pt, Cu-Ni, Cu-Ag alloys, etc.) • Forms (solid, porous, etc.) • Shapes (thin film, thin sheet, roll of thin sheet, bu
Slide 10: CVD Graphene Needs a Catalytic Substrate to Grow
CVD HowGraphene to get to aNeeds a Catalytic Substrate UNIVERSAL to Grow Low High cost, HighQuality Volume,Graphene High or Films higher Quality CVD Graphene Manufacturing Solution! R&D Pilot Production Sheet Sheet Multiple Sheets or Roll Process Demo Application Demo 10-100 sheets, or 2-5 cm 20
Slide 11: One of our Key Inspiration is YOUR Research work!
How to get to a UNIVERSAL Low cost, High Volume, High or higher Quality CVD Graphene Manufacturing Solution! One of our Key Inspiration is YOUR Research work! mm 11
Slide 12: Inspiration from >30 years of custom CVD know-how
How to get to a UNIVERSAL Low cost, High Volume, High or higher Quality CVD Graphene Manufacturing Solution! The rest of our Inspiration is >30 years of know-how in custom CVD system systems and solutions design and manufacturing! “Cu-foil-pocket“ Enclosure Box Proposed Single Cu Sheet Solution: • r
Slide 13: Patent Pending Single Sheet Solutions Compatible with CVD Tube Furnaces
Our Patent Pending, Single Sheet Solutions are compatible with CVD tube furnaces Cu “liner” Higher Purity Higher Quality CVD substrate Benefits: (optimization still ongoing) • Enclosure Box acts as thermal integrating sphere providing large area thermal uniformity • diffusion of process gas into box
Slide 14: Single Sheet Solution Benefits
Our Patent Pending, Single Sheet Solutions are compatible with CVD tube furnaces Benefits: (optimization still ongoing) • enables > 10 cm Cu grains • enables > mm size single crystal graphene grains • enable mixture of high and low pressure process without usual maintenance and reproducibility penal
Slide 15: Crystal structure of individual graphene islands?
What is the crystal structure of individual graphene islands? Method of investigation: Selected Area Electron Diffraction on CVD graphene islands transferred on a 3mm dia. TEM grid Research carried out in part at the Center for Functional Nanomaterials, Brookhaven National Laboratory, which is suppo
Slide 16: Crystal structure of individual graphene islands: results
What is the crystal structure of individual graphene islands? NON-HEXAGONAL POLYGONAL ISLANDS HEXAGONAL ISLANDS POLYCRYSTALLINE SINGLE CRYSTAL CVD GRAPHENE CVD GRAPHENE Tilted: +30˚ Reference: 0˚ Tilted: +35˚ Research carried out in part at the Center for Functional Nanomaterials, Brookhaven Nationa
Slide 17: Proposed Multiple Cu Sheet Solution
How to get to a UNIVERSAL Low cost, High Volume, High or higher Quality CVD Graphene Manufacturing Solution! Proposed Multiple Cu Sheet Solution: • Parallel Processing: Vertically Stack thin Enclosure Boxes (Patent Pending) 17
Slide 18: Vertically stacked substrates inside tall Enclosure Box
How to get to a UNIVERSAL Low cost, High Volume, High or higher Quality CVD Graphene Manufacturing Solution! Cu “liner” CVD substrates Proposed Multiple Cu Sheet Solution: • Vertically stacked substrates sheets inside tall Enclosure Box (Patent Pending) 18
Slide 19: Roll of flexible substrate in batch CVD tube furnace
How to get to a UNIVERSAL Low cost, High Volume, High or higher Quality CVD Graphene Manufacturing Solution! Archimedes Spiral wound Archimedes Roll CVD Substrate Roll in Enclosure Box Proposed Roll of flexible Substrate Processing in Batch CVD Tube Furnace with novel tooling resulting in Aric
Slide 20: Increasing Batch Size for Flexible Foil Substrate
How to Increase the Batch Size for a given CVD Tube Furnace for a Flexible Foil Substrate Gap Do, D1 Roll Substrate Foil into an Archimedes Spiral PRIOR ART NEW SOLUTION (Patent pending) ●For online calculator see: http://www.giangrandi.ch/soft/spiral/spiral.shtml 20
Slide 21: Maximum Substrate Length for Archimedes Spiral Foil Substrate
Maximum Substrate Length for Archimedes Spiral Foil Substrate for 80% inner process tube diameter utilization Length of roll of Cu foil [m] in batch process enabled by proprietary tooling 150 135 0.5 mm gap 120 1 mm gap 105 4 mm gap 90 75 60 45 30 15 0 100 150 200 250 300 350 400 450 500 Process tub
Slide 22: Maximum Substrate Area Gain
Maximum Substrate AREA Gain for 80% process tube inner diameter utilization substrate width Process tube Process tube Max area gain Max area gain Max area gain Length of roll Length of roll Length of roll D1 = outer D0 = inner typical flat 0.5 mm gap 1 mm gap 4 mm gap [inch] [mm] [m] [mm] [m
Slide 23: Roll to Roll vs Batch
Roll to Roll Batch ● Reel size = ? ● Substrate size = ? ● Line speed = ? ● Cycle time = ? ● Equipment development Cost +++ ● Equipment development Cost + ● Process development Cost +++ ● Process development Cost + ● Chemical delivery system ++ ● Chemical delivery system + ● Exhaust treatment system
Slide 24: Family of EasyTube and EasyGraphene CVD Processing Systems
Family of EasyTube® and EasyGraphene™ CVD Processing Systems CVD processing system family ● Scales CVD graphene processes in size and production volume with low execution risk ● Operates with a wider process window to manufacture CVD graphene at lower cost and/or time ● Enables the development of ne
Slide 25: Many CVD Processes Need a Substrate to Grow Nano-Structured Materials
Many CVD Processes Need a Substrate to Grow High Quality Nano-Structured Materials 2D Graphene 1D Nano Materials > mm CVD Graphene on Cu foil VACNT on SS foil VASiNW on Si (111) RASiNW on SS foil 25
Slide 26: Flexible Metal Foils as Compatible Substrate
Flexible Metal Foils can be a Compatible Substrate for selected CVD processes Copper Foil Stainless Steel Foil Aluminum Foil CVD processing of a Flexible Foil Substrate Roll makes subsequent nano-structured material harvesting/processing much more cost efficient (automatable) than many small size su
Slide 27: Case Study: CVD Graphene Volume Production
Case Study: CVD Graphene Volume Production for 300 mm wide Cu Foil 15 or 30 min annealing + Roll to Roll CVD system: 15 or 30 min growth 2 m long hot zone @ 1040 C, AP or LP Line speed = 4 or 2 m/h Max production = 29 or 14 m2/24h Improvement New Archimedes Spiral Batch Process System: Potential
Slide 28: Case Study: VAMWCNT Volume Production
Case Study: 1 mm tall VAMWCNT Volume Production with 300 mm wide SS Foil Roll to Roll CVD system: 15 min Soak @ 600 C + 60 min Growth @ 750 C 2 m long hot zone AP Line speed = 1.4 m/h Max production = 10 m2/24h = 0.32 kg/24h New Archimedes Spiral Batch Process System: Improvement < 60 min heat
Slide 29: Case Study: RA Si NW Volume Production
Case Study 50 µm RA Si NW Volume Production with 300 mm wide SS Foil Roll to Roll CVD system: 10min Soak @ 550C + 30min Growth @ 550C 2 m long hot zone 100 Torr Line speed = 3 m/h 100 Torr Operation Max production= 22 m2/24h Improvement New Archimedes Spiral Batch Process System: Potential
Slide 30: Summary
Summary ● CVD Equipment Corporation continues to expand capabilities in: ● Equipment design ● Process development ● Material applications ● CVD Application Laboratory supports custom process and material development opportunities to advance the state of the art and pilot production scale-up demonstr