Samco, Inc. · TSE:6387
Samco — Epiluvac — Investor Presentation (October 2019)
11 slides from Samco's investor presentation, Oct 21, 2019
Slide 1: CVD epitaxy reactor systems for wide bandgap (WBG) semiconductors
CVD epitaxy reactor systems for wide bandgap (WBG) semiconductors 2019-10-21 CONFIDENTIAL © Epiluvac AB 1
Slide 2: Applications for semiconductors based on new materials replacing silicon
Applications for semiconductors based on ”new” materials replacing silicon SiC & GaN 2019-10-21 CONFIDENTIAL © Epiluvac AB 2
Slide 3: Epiluvac solutions in the manufacturing process
Epiluvac solutions in the manufacturing process ▪ Bulk crystal growth systems ▪ Epitaxy reactors 2019-10-21 CONFIDENTIAL © Epiluvac AB 3
Slide 4: The company
The company ▪ Founded 2014 by a team of former Aixtron/Epigress engineers ▪ Background from 30 years of CVD equipment development – Silicon Carbide (SiC) epi reactors since 1993 – Experience from various reactor designs (CVD, UHV, PVT/sublimation, Graphene, RIE, PECVD, HTCVD and HVPE) – Expertise in
Slide 5: What we offer
What we offer CVD epitaxy reactors for SiC and GaN ▪ Single-wafer hot-wall ▪ High wafer uniformity ▪ Low cost of operation SiC bulk growth systems ▪ For PVT/sublimation ▪ Cost efficient proven design Customized solutions ▪ High temperature ▪ Low pressure / Vacuum 2019-10-21 CONFIDENTIAL © Epiluvac A
Slide 6: CVD epitaxy reactors
CVD epitaxy reactors Epiluvac EPI 1000 Epiluvac ER3 (NEW!) ▪ Proven R&D tool for SiC and GaN ▪ Optimized for highest possible yield by excellent epitaxy uniformity and minimal number of defects. ▪ Horizontal quartz tube with RF ▪ Ready for 200 mm SiC and GaN heating ▪ Quartz-free and ready for chlor
Slide 7: Crystal growth systems
Crystal growth systems Epiluvac SB3 ▪ Long experience. First system delivered 1996! ▪ For Physical Vapor Transport (PVT) ▪ For 150 mm diameter (200 mm optional) ▪ Optimized cost/performance for volume production of SiC-ingots – Adapted to each customer’s process ▪ Small footprint – Compact design –
Slide 8: Customized Solutions
Customized Solutions High temperature Low pressure / Vacuum Complex reactor solutions Complete systems including: - Control hardware and software - Safety according to European norms - Documentation - Test and commissioning Small to multi-million Euro projects 2019-10-21 CONFIDENTIAL © Epiluvac AB 8
Slide 9: Innovative start-ups and researchers rely on our technology
Innovative start-ups and researchers rely on our technology Group III-V GaN-on-SiC epitaxy Semiconductor research (SiC, GaN, etc.) Growth of GaAs nanowires for PV application by SolVoltaics Aerotaxy® GaN epitaxy within C3NiT – Swedish Centre for III-nitride technology Upgrades and maintenance of SiC
Slide 10: Epiluvac - Summary
Epiluvac - Summary ▪ Pioneers in tools for SiC epi and advanced CVD ▪ Focused on WBG semiconductors ▪ Aims for leadership in terms of technical performance ▪ Innovations for improved uniformity and yield ▪ Provides customized, as well as standardized solutions ▪ …also for bulk growth of SiC 2019-10-
Slide 11: Thank you!
Follow us at LinkedIn or www.epiluvac.com Thank you! 2019-10-21 CONFIDENTIAL © Epiluvac AB 11