Cvd Equipment Corporation · NASDAQ:CVV
Cvd Equipment — Nanotech Conference & Expo 2012
15 slides from Cvd Equipment's conference presentation, Jun 19, 2012
Slide 1: Rapid Raman Quality Analysis of CVD Graphene directly on Growth Substrates
enabling tomorrow’s technologies™ Rapid Raman Quality Analysis of CVD Graphene directly on Growth Substrates M. Monville*, A. Rzhevskii**, S. Banerjee*, and a subsidiary of CVD Equipment Corporation Karlheinz Strobl* V.P. of Business Development * CVD Equipment Corporation, 1860 Smithtown Avenue, Ro
Slide 2: Commercialization of Nano Materials
enabling tomorrow’s technologies™ Commercialization of Nano Materials Nano Materials by themselves are of limited commercial value To make them commercially interesting they typically need to be transformed into Macro Materials having unique higher performance a subsidiary of CVD Equipment Corporati
Slide 3: Accelerating Commercialization of Innovative Technologies: R&D plus Production Equipment
enabling tomorrow’s technologies™ To Accelerate the Commercialization of Innovative Technologies one needs R&D + Production Equipment and Commercialization Volume production Pilot production a subsidiary of CVD Equipment Corporation R&D Invention Quick QC procedures, Need QC Instruments for yield an
Slide 4: Graphene, the New 2D Nano Material
enabling tomorrow’s technologies™ Graphene, the NEW 2D Nano Material What is needed to accelerate its Commercialization for electronic and TCO application? Manufacturing Chemical Vapor Deposition (CVD) of carbon precursors cracked onto catalysts substrates - mainly Cu and Ni alloys - at 450 -1000 C
Slide 5: Standard Characterization Techniques available for graphene
enabling tomorrow’s technologies™ Standard Characterization Techniques available for graphene Scanning Electron microscopy + performed on as-grown samples - tedious protocol, - requires skilled labor - cannot clearly give the number of graphene layers, limited information extractable Optical microsc
Slide 6: Problem: rapid, integrated, automated quality analysis of CVD graphene
enabling tomorrow’s technologies™ Problem raised for a rapid, integrated and automated quality analysis of CVD graphene: Raman Signal Analysis is usually performed AFTER TRANSFER of CVD graphene onto an optically Raman signal enhancing substrate (285nm SiO2 layer is the standard) HOWEVER, analyzing
Slide 7: CVD Graphene Problem Sample caused by rapid transfer
enabling tomorrow’s technologies™ CVD Graphene PROBLEM SAMPLE caused by rapid (< 8h) transfer: higher chances to damage the CVD graphene Holes Collapsed graphene aggregates a subsidiary of CVD Equipment Corporation Optical microscopy (x100) of CVD Graphene transferred onto 285nm SiO2 - Si wafer Fold
Slide 8: Proposed Solution for rapid, integrated and automated QC analysis
enabling tomorrow’s technologies™ Proposed Solution for a rapid, integrated and automated QC analysis of CVD graphene grown on Cu or Ni films or foils WE PROPOSE: • Develop a method allowing a DIRECT and FAST QC analysis of CVD graphene without transfer • Utilize existing commercial available optica
Slide 9: Systems used for Raman QC of CVD graphene
enabling tomorrow’s technologies™ Systems used for Raman QC of CVD graphene Thermo Scientific Raman DXR Microscope EasyTube® 3000-CVDGraphene™/CNT a subsidiary of CVD Equipment Corporation with XYZ motion control 50 mm 50 mm 50x50 mm Cu foil, 25 µm thick 16-points sampling matrix (Alfa Aesar, 99.8%
Slide 10: Raman Signals of CVD Graphene on Cu Foil
enabling tomorrow’s technologies™ Raman Signals of CVD Graphene on Cu Foil sampled on 16 grid locations 50 mm 50mmx50mm Cu foil Alfa Aesar, 99.8% purity, 25 µm thick 50 mm Note the large variations in background signal shape a subsidiary of CVD Equipment Corporation D G 2D 10
Slide 11: Baseline corrected Raman Signal of as-grown CVD Graphene
enabling tomorrow’s technologies™ Baseline corrected Raman Signal of as-grown CVD Graphene Labview Program used to initially develop and test Automatic Background Subtraction Algorithm baseline corrected signal raw signal of as-grown CVD Graphene on Cu Foil with background due to Cu fluorescence ext
Slide 12: Automated spectral analysis steps
enabling tomorrow’s technologies™ Automated spectral analysis steps : 1. Establish the exclusion windows (input the start and end of the spectral window). 2. Curve fit with a polynomial curve the extracted spectra (6 to 12 order depending on shape of background). 3. Use the fitted parameter to estab
Slide 13: Accelerated CVD Graphene QC Method: Process Validation
enabling tomorrow’s technologies™ Accelerated CVD Graphene QC Method Process Validation D G 2D 3) 1) D G 2D 2) a subsidiary of CVD Equipment Corporation 2) 1) raw Raman signal on as-grown 3) raw Raman signal obtained for CVD graphene on Cu Foil the same CVD graphene sample transferred to 285nm SiO2
Slide 14: Sample Map of selected processed QC Parameters
enabling tomorrow’s technologies™ Sample Map of selected processed QC Parameters 50 mm 2D / G D/G 50 mm Series1 Series1 2.8-3.0 Series2 Series2 2.6-2.8 0.20-0.30 2.4-2.6 0.10-0.20 Series3 Series3 2.2-2.4 0.00-0.10 2.0-2.2 Series4 Series4 1 2 3 4 1 2 3 4 a subsidiary of CVD Equipment Corporation 2D/G
Slide 15: Summary
enabling tomorrow’s technologies™ Summary • Raman Analysis with automated background correction can be used without transfer for QC of CVD Graphene grown on Cu Foil • Intelligent background correction algorithm is capable of adapting to local different fluorescence background signal • CVD Graphene g