Slide 1: MEMS-Based Resonators and Oscillators are Now Replacing Quartz
MEMS-Based Resonators and Oscillators are Now Replacing Quartz Dr. Aaron Partridge SiTime Corp. ISSCC February 20, 2012
Slide 2: MEMS timing is here now and will replace quartz
My purpose is to convince you that MEMS timing is here now. MEMS will replace quartz oscillators in most applications. The value add is strong enough to transform an industry. Aaron Partridge MEMS-Based Resonators and Oscillators 2 of 16 are Now Replacing Quartz
Slide 3: Quartz Oscillators vs MEMS Oscillators
Ecliptek Quartz Oscillators: MEMS Oscillators: o Ceramic/metal package o Plastic QFN package o Quartz plate and driver o Silicon MEMS die and circuit CMOS die o Dedicated factories o Standard IC fabs Aaron Partridge MEMS-Based Resonators and Oscillators 3 of 16 are Now Replacing Quartz
Slide 4: MEMS resonator operation
Corner Center Edge o Like a 2D bell –held in the center with its outer edges ringing. Motion is a few nanometers. o Buried inside the chip, not on the surface. Aaron Partridge MEMS-Based Resonators and Oscillators 4 of 16 are Now Replacing Quartz
Slide 5: kHz MEMS tuning forks for 32kHz applications
o kHz MEMS tuning forks for apps now served by 32kHz quartz tuning forks. o Driven with sub-microamp supply currents. Aaron Partridge MEMS-Based Resonators and Oscillators 5 of 16 are Now Replacing Quartz
Slide 6: Chip Surface Encapsulation Resonator
Chip Surface Encapsulation Resonator Aaron Partridge MEMS-Based Resonators and Oscillators 6 of 16 are Now Replacing Quartz
Slide 7: MEMS Resonator and CMOS Circuits
MEMS Resonator CMOS Circuits Prog Config Sustaining &OE I/O PROM Amp Regs Vcc Temp Frac GND Sensor Control PLL Dvr Clk Aaron Partridge MEMS-Based Resonators and Oscillators 7 of 16 are Now Replacing Quartz
Slide 8: Aaron Partridge MEMS-Based Resonators and Oscillators are Now Replacing Quartz
Aaron Partridge MEMS-Based Resonators and Oscillators 8 of 16 are Now Replacing Quartz
Slide 9: MEMS timing advantages
o Tremendous Flexibility o New features o Delivered performance o Short lead times o Exceptional quality and reliability o Low cost, high value Aaron Partridge MEMS-Based Resonators and Oscillators 9 of 16 are Now Replacing Quartz
Slide 10: Aaron Partridge MEMS-Based Resonators and Oscillators are Now Replacing Quartz
Aaron Partridge MEMS-Based Resonators and Oscillators 10 of 16 are Now Replacing Quartz
Slide 11: TCXO Frequency v. Temperature
TCXO Frequency v. Temperature 2.5 2 1977 units, 5 lots Frequency Variation (ppm) 1.5 ±2.5pp 1 m 0.5 0 -0.5 -1 -1.5 -50 to +90C -2 -2.5 -40 -20 0 20 40 60 80 Temperature (degC) Aaron Partridge MEMS-Based Resonators and Oscillators 11 of 16 are Now Replacing Quartz
Slide 12: Integrated jitter at 156.25MHz
fcarrier = 156.25MHz Int jitter (12k-20MHz) • no spurs = 493fs • w/ spurs = 689fs -125dBc/rtHz -152dBc/rtHz 12k-20MHz Aaron Partridge MEMS-Based Resonators and Oscillators 12 of 16 are Now Replacing Quartz
Slide 13: Vibration Induced Spur vs. Acceleration
Vibration Induced Spur vs. Acceleration 0 fvibration = 100Hz Vibratiion Spur Value (dBc) -20 -40 Competitive -60 -80 S. MEMS -100 -120 0 10 20 30 40 50 Vibration Acceleration (g) Aaron Partridge MEMS-Based Resonators and Oscillators 13 of 16 are Now Replacing Quartz
Slide 14: Phase Jitter Without and With EMI Interference
Phase Jitter Without and With EMI Interference 25.0 Int Phase Jitter (ps, 12k-20MHz) 21.3 20.0 Problematic for electrostatic discharge 15.0 S. MEMS 10.0 Competitive 5.9 5.0 1.6 1.6 0.5 0.8 0.7 0.5 0.0 No Interference Interference Aaron Partridge MEMS-Based Resonators and Oscillators 14 of 16 are Now
Slide 15: Unit Shipments and top customers
Unit Shipments 60 4 of the top 5 Computer Makers 50 3 of the top 5 Consumer Electronics 3 of the top 5 Contract Manufacturers Units (MU Recognized) 40 5 of the top 5 ODMs 30 20 10 0 2007 2008 2009 2010 2011 Year Aaron Partridge MEMS-Based Resonators and Oscillators 15 of 16 are Now Replacing Quartz
Slide 16: Technology has fundamentally helped Humanity
o Technology has fundamentally helped Humanity. o Engineers make small contributions that are multiplied countless times. o What you do matters to Billions of people! Dorothea Lang, “ Migrant Mother”1936 Aaron Partridge MEMS-Based Resonators and Oscillators 16 of 16 are Now Replacing Quartz
Slide 17: Thank You
Thank You Aaron Partridge MEMS-Based Resonators and Oscillators 17 of 16 are Now Replacing Quartz
Slide 18: Abstract
Abstract The first commercial MEMS-based timing devices shipped in 2007. In just five years they are transforming the timing industry. The first parts offered XO stability and various advantages like programmability, but lacked the signal quality to support more than the basic applications. Recent p