CVD Equipment Corporation · NASDAQ:CVV
CVD Equipment — Graphene 2015
32 slides from CVD Equipment's conference presentation, 2015
Slide 1: Graphene Innovations Drive Nanomaterial Manufacturing Technologies
Graphene Innovations Drive Nanomaterial Manufacturing Technologies Karlheinz Strobl, V.P. of Business Development M at h i e u M o nv i l l e , R i j u S i n g h a l , a n d S a m u e l Wr i g ht Graphene 2015 enabling tomorrow’s technologies™
Slide 2: Operations & Manufacturing
Operations & enabling tomorrow’s technologies™ Manufacturing Operations In business > 33 Years Headquarters in Central Islip, NY Additional facility in Saugerties, NY ~ 190 employees Recently moved into a 130,000 square foot company owned facility increasing Company owned facilities to a t
Slide 3: CVD = Chemical Vapor Deposition
CVD = Chemical Vapor Deposition = Chemistry + Temperature + Pressure Control Chemical Vapor Deposition is the Controlled Decomposition (“cracking”) of Gases/Liquids used to Deposit or Grow a Film of Material onto a Surface It requires MULTIDISPLINARY KNOW-HOW to Design and Manufacture Safe Processin
Slide 4: We sell CVD Systems for Research and Production
We sell CVD enabling tomorrow’s technologies™ Systems for Research and Production FirstNano™ Systems for Research EasyTube® EasyGas™ EasyExhaust™ CVD Systems for Production Photovoltaic Transparent Conductive Oxide (TCO) Reel-to-Reel CVD deposition Liquid Phase Epitaxial Deposition Medica
Slide 5: Commercialization of Nanomaterials
Commercialization of Nanomaterials 5 Graphene 2015 enabling tomorrow’s technologies™
Slide 6: CVD Equipment Corporation
CVD enabling tomorrow’s technologies™ Equipment Corporation Designs and manufactures both Standard and Configurable R&D, Pilot & Production chemical vapor deposition systems Operates an Application Laboratory Performs Contract Process Development Develops Process and Equipment for Research Materia
Slide 7: Novel NanotoMacro Manufacturing Platform
Novel NanotoMacro™ Manufacturing Platform OPTIMIZED FOR: 3D graphene, NanotoMacro™ Thickness carbon-derived- Surface density carbons, hollow Manufacturing Density carbon structures, Platform Electrical conductivity Raw nanomaterial manufacturing etc. Thermal conductivity 3D Surface area
Slide 8: 300 mm Graphene System
300 mm enabling tomorrow’s technologies™ Graphene System Some of the Innovations reported later in the presentation have been inspired by a custom configured 300 mm Graphene System order from Nano Carbon (Booth 519) Graphene Samples are available from www.grapheneshop.pl Developed in cooperation w
Slide 9: How to get to a Universal Low Cost CVD Graphene Manufacturing Solution
How to get to a UNIVERSAL Low cost, High Volume, High or higher Quality CVD Graphene Manufacturing Solution WAFER FOIL ROLL FOAM Wide range of CVD growth Substrates in use today Materials (Cu, Ni, Pt, Cu-Ni, Cu-Ag alloys, etc.) Forms (solid, porous, etc.) Shapes (thin film, thin sheet, roll of
Slide 10: How to get to a Universal Low Cost CVD Graphene Manufacturing Solution
How to get to a UNIVERSAL Low cost, High Volume, High or higher Quality CVD Graphene Manufacturing Solution! R&D PILOT PRODUCTION Sheet Process Demo Sheet Application Demo Multiple Sheets or Roll 2-5 cm 20-30-60 cm 10-100 sheets, or 20-60 cm x 10-100m roll Wide range of CVD growth Substrates Size Ho
Slide 11: Copper enclosure
How to get to a UNIVERSAL Low cost, High Volume, High or higher Quality CVD Graphene Manufacturing Solution! ‘Copper enclosure’ A copper pocket Is made by folding a piece of copper foil (99.8% Alfa Aesar) and crimping the three edges. The copper enclosure is placed in the tube furnace for graphene g
Slide 12: Single Cu sheet solution: process compatible enclosure box
How to get to a UNIVERSAL Low cost, High Volume, High or higher Quality CVD Graphene Manufacturing Solution! The rest of our Inspiration is our 33 years of know-how in custom CVD system design, solutions, and manufacturing! “Cu-foil-pocket” Enclosure Box Proposed Single Cu Sheet Solution: Replace “C
Slide 13: Patent Pending Single Sheet Solutions Compatible with CVD Tube Furnaces
Our Patent Pending, enabling tomorrow’s technologies™ Single Sheet Solutions are compatible with CVD tube furnaces Benefits: (optimization still ongoing) Cu “liner” Enclosure Box acts as thermal integrating sphere providing large area thermal uniformity Diffusion of process gas into box through
Slide 14: Patent Pending Single Sheet Solutions Benefits
Our Patent Pending, enabling tomorrow’s technologies™ Single Sheet Solutions are compatible with CVD tube furnaces Benefits: (optimization still ongoing) Enables > 10 cm Cu grains Enables > mm size single crystal graphene grains Enables a mixture of high and low pressure processes without usua
Slide 15: What is the crystal structure of individual graphene islands?
What is the crystal structure of individual graphene islands? Method of investigation: Selected Area Electron Diffraction on CVD graphene islands transferred on a 3 mm diameter TEM grid Research carried out in part at the Center for Functional Nanomaterials, Brookhaven National Laboratory, which is
Slide 16: What is the crystal structure of individual graphene islands?
What is the crystal structure of individual graphene islands? HEXAGONAL ISLANDS SINGLE CRYSTAL CVD GRAPHENE NON-HEXAGONAL POLYGONAL ISLANDS POLYCRYSTALLINE CVD GRAPHENE Tilted: +30˚ Tilted: +35˚ Reference: 0˚ Research carried out in part at the Center for Functional Nanomaterials, Brookhaven Nationa
Slide 17: Multiple Cu Sheets: Vertically Stacked Enclosure Boxes
How to get to a UNIVERSAL Low cost, High Volume, High or higher Quality CVD Graphene Manufacturing Solution! Proposed Multiple Cu Sheets Solution: Parallel Processing: Vertically Stack thin Enclosure Boxes (Patent Pending) 17 Graphene 2015 enabling tomorrow’s technologies™
Slide 18: Vertically stacked substrates inside tall enclosure box
How to get to a UNIVERSAL Low cost, High Volume, High or higher Quality CVD Graphene Manufacturing Solution! Cu “liner” CVD substrates Proposed Multiple Cu Sheets Solution: Vertically stacked substrates sheets inside tall Enclosure Box (Patent Pending) 18 Graphene 2015 enabling tomorrow’s technologi
Slide 19: Roll of flexible substrate in batch CVD tube furnace
How to get to a UNIVERSAL Low cost, High Volume, High or higher Quality CVD Graphene Manufacturing Solution! Archimedes Spiral wound Archimedes Roll CVD Substrate Roll in Enclosure Box Proposed Roll of flexible Substrate Processing in Batch CVD Tube Furnace with novel tooling resulting in Arichmedes
Slide 20: Increasing batch size for flexible foil substrate
How to Increase the Batch Size for a given CVD Tube Furnace for a Flexible Foil Substrate Gap Do, D1 Roll Substrate Foil into an Archimedes Spiral Prior Art New Solution (Patent pending) For online calculator see: http://www.giangrandi.ch/soft/spiral/spiral.shtml 20 Graphene 2015 enabling tomorrow’s
Slide 21: Maximum Substrate Length for Archimedes Spiral Foil Substrate
Maximum Substrate Length for Archimedes Spiral Foil Substrate for 80% inner process tube diameter utilization Length of roll of Cu foil [m] in batch process 150 enabled by proprietary tooling 135 0.5 mm 120 gap 1 mm 105 gap 90 75 60 45 30 15 0 100 150 200 250 300 350 400 450 500 PROCESS TUBE DIAMETE
Slide 22: Maximum Substrate Area Gain
Maximum Substrate AREA Gain for 80% process tube inner diameter utilization substrate width Process tube Process tube Max area gain Max area gain Max area gain Length of roll Length of roll Length of roll D1 = outer D0 = inner typical flat 0.5 mm gap 1 mm gap 4 mm gap [inch] [mm] [m] [mm] [m
Slide 23: Roll to Roll versus Batch comparison
Maximum Substrate AREA Gain for 80% process tube inner diameter utilization Roll to Roll Batch Reel size = ? Substrate size = ? Line speed = ? Cycle time = ? Equipment development Cost +++ Equipment development Cost + Process development Cost +++ Process development Cost + Chemical delivery system +
Slide 24: EasyTube CVD Processing Systems
enabling tomorrow’s technologies™ EasyTube® CVD Processing Systems Scales CVD graphene processes in size and production volume with low execution risk Operates with a 50 mm Substrate 100 mm Substrate wider process window to manufacture CVD graphene at lower cost and/or time Enables the develop
Slide 25: Many CVD Processes Need a Substrate to Grow Nano-Structured Materials
Many CVD Processes Need a Substrate to Grow High Quality Nano-Structured Materials 2D Graphene 1D Nano Materials CVD Graphene on Cu foil VACNT on SS foil VASiNW on Si (111) RASiNW on SS foil 25 Graphene 2015 enabling tomorrow’s technologies™
Slide 26: Foil substrates for nano-structured material growth
Many CVD Processes Need a Substrate to Grow High Quality Nano-Structured Materials Copper Foil Aluminum Foil Stainless Steel Foil CVD processing of a Flexible Foil Substrate Roll makes subsequent nano- structured material harvesting/processing much more cost efficient (automatable)than many small si
Slide 27: Case Study: CVD Graphene Volume Production for 300 mm Cu Foil
Case Study: CVD enabling tomorrow’s technologies™ Graphene Volume Production for 300 mm wide Cu Foil Roll to Roll CVD system: 15 or 30 min annealing + 15 or 30 min growth @ 1040 C, AP or LP 2 m long hot zone Line speed = 4 or 2 m/h Max production = 29 or 14 Improvement Potential m2/24h 5-9X pr
Slide 28: Case Study: VAMWCNT Volume Production with 300 mm SS Foil
Case Study: 1 mm tall enabling tomorrow’s technologies™ VAMWCNT Volume Production with 300 mm wide SS Foil Roll to Roll CVD system: 15 min Soak @ 600 oC + 60 min Growth @ 750 oC AP 2 m long hot zone Line speed = 1.4 m/h Improvement Potential Max production = 10 m2/24h 5X productivity gain = 0.32
Slide 29: Case Study: RA Si NW Volume Production with 300 mm SS Foil
Case Study 50 µm enabling tomorrow’s technologies™ RA Si NW Volume Production with 300 mm wide SS Foil Roll to Roll CVD system: 10 min Soak @ 550 oC + 30 min Growth @ 550C 100 Torr 2 m long hot zone Line speed = 3 m/h 100 Torr Operation Improvement Potential Max production = 22 m2/24h 5X prod
Slide 30: Widening CVD graphene manufacturing options and process equipment challenges
Ever widening CVD graphene manufacturing options lead to more process equipment challenges Case Study: Investigation of bi-layer CVD graphene growth on Cu foil with Ethanol bubbler, inspired by work of Prof. Shigeo Maruyama (Tokyo University) and driven by request of Prof. Rodney Rudolf Ulsan Nation
Slide 31: Additional process feedback on the EasyTube platform
Additional Process feedback can be provided on the EasyTube® system platform CONCEPT GUI ENHANCEMENT OPTIONS final details are still under development Color coding for different parameter WYSIWYG: groups: Auto ranging MFC’s display Precursors and control is Pressure/Purge independent Heating o
Slide 32: Summary
Summary CVD Equipment Corporation continues to expand capabilities in: Equipment design and process control Process development Material applications CVD Application Laboratory supports custom process and material development opportunities to advance the state of the art and pilot production sc