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Agilent Technologies — Technical Presentation (April 2017)
60 slides from Agilent Technologies's technical presentation, Apr 20, 2017
Slide 1: Absolute Specular Reflectance Measurements at Angles and Beyond
Absolute Specular Reflectance Measurements at Angles and Beyond MARK FISHER APPLICATIONS ENGINEER AGILENT TECHNOLOGIES 20 APRIL 2017 1
Slide 2: What We Will be Going Over
– What We Will be Going Over – What are My Choices in Accessories ? Are there Advantages/Disadvantages I Need to Know ? What Kind of Measurements Can I Make? Are there any Limitations ? How Can I Make Absolute Specular Reflectance Measurements at the Angle of My Choosing? Examples of Sample Measurem
Slide 3: Thank the People That Got Us Here
Thank the People That Got Us Here
Slide 4: Specular Reflectance
– Specular Reflectance – How has it Been Done in the Past? Fixed Angle Relative Reflectance Absolute V-N V-W Variable Angle
Slide 5: The Agilent Cary Family
UV-Vis NIR Spectroscopy Solutions The Agilent Cary Family Cary 5000/6000i/7000 “A word from our sponsors” Cary 4000 Performance Cary Eclipse Cary 300 Cary 100 8454 Cary 60 Routine to Research
Slide 6: Measurement Modes
Measurement Modes 1 Absolute specular reflection 2 Diffuse scattering 3 Glossy scattering 4 Direct transmission 5 Scattered transmission 6 Partial scattered transmsision
Slide 7: Relative Reflectance Measurement
Relative Reflectance Measurement Reference Measurement Results in Reflectance Measurement Relative to the Sample Measurement Reference used Agilent Restricted 7 April 20, 2017
Slide 8: Various Specular Reflectance Accessories
Various Specular Reflectance Accessories Near Normal 15 degrees 30 degrees 45 degrees Variable Angle Specular Reflectance Accessory Fixed Angle Accessory VASRA 20-70 deg (0.5 deg steps) Absolute Specular Reflectance Accessory (V-W design) Agilent Restricted 8 April 20, 2017
Slide 9: Cary 7000 UMS and UMA
Cary 7000 UMS and UMA Universal Measurement Accessory
Slide 10: Cary 7000 UMS and UMA
Cary 7000 UMS and UMA Cary 7000
Slide 11: Cary 7000 UMS and UMA
Cary 7000 UMS and UMA Cary 7000 Universal Measurement Spectrophotometer
Slide 12: Cary 7000 UMS (G6873AA)
Cary 7000 UMS (G6873AA) Overview A turn-key, automated, UV-Vis-NIR spectrophotometer with Universal Measurement Accessory provides exceptional value, ease of use and performance – unmatched individually, unbeatable in a package. Application Focus (Solids) • Photonics/Optics/Thin Films • Material res
Slide 13: UV-Vis-NIR Spectrophotometry
UV-Vis-NIR Spectrophotometry %T and %R Cost per analysis Angular Control Automation Flexibility Productivity Consistency Easy of Use (%T and %R) Accuracy Accessible Performance Reliability Research QA/QC Testing Trouble Shooting
Slide 14: Cary UMS Schematic
Cary UMS Schematic Productivity Performance Automated independent Absolute reflection and control of polarization (s or transmission by definition – p) detector (D) position and the only difference between sample rotation. baseline and measurement is the sample itself. One baseline is needed for all
Slide 15: Sandwich Detector
Sandwich Detector Feature Advantage Benefit Si/InGaAs Sandwich Combined UV-Vis and NIR detector. Consistent data. Detector No moving parts, ie. no beam shift Large wavelength range. at detector changeover. (UV-Vis-NIR)
Slide 16: Direct Detector Illumination
Direct Detector Illumination Feature Advantage Benefit Direct Detector All reflective, high efficiency, aluminum optics Productivity – saves time Illumination maintain high signal level and signal quality from source to detector Loss in sensitivity, worse spectra Alternative is using small DRAs and/
Slide 17: Unique Wire Grid Polarizers
Unique Wire Grid Polarizers The Agilent Cary UV-Vis-NIR automated polarizer provides the next-generation of polarization control: A nano-wire grid which is lithographically laid onto a highly transmissive quartz substrate.
Slide 18: Wire Grid Polarizer
Wire Grid Polarizer Feature Advantage Benefit High contrast ratio High quality and control of Superior Data Quality S and P polarized light. better throughput Wide acceptance Polarization of full Improving throughput angle spectrophotometer beam leading to improved system without compromise sensitiv
Slide 19: Measure with 0.02° angular precision
Measure with 0.02° angular precision Unique High Resolution Optical Encoder Feature Advantage Benefit High Resolution Optical Fine angular control of sample Robustness/Reliability - system Encoder rotation and detector position to never misses a step and permits 0.02 deg. precise sample characteriza
Slide 20: UMA Options: Edge Mount Sample Holder
P/N: G6874A, UMA Options Edge Mount Sample Holder Adjustable Samples Sizes: From approx 1" (25.4 mm) to 6" (150 mm) in diameter. Thicknness: Approx 200 mm to 5 mm thick. Non contact with front/back face of sample. Max angular range is slightly limited due to “U” Please note this picture is shaped fr
Slide 21: UMA Options: Round Sample Holder
P/N: G6874A, UMA Options Round Sample Holder Sample Sizes: 1” and 2” round (2 mm selvage area) Dedicated, simple, easy to use. Avoids contact with center of sample. Ensure sample is not “offset” by a thick frame around optic, or that the frame increases the actual diameter of the sample. Samples sit
Slide 22: Cube Beam Splitter Holder
Cube Beam Splitter Holder
Slide 23: Solids Autosampler
Solids Autosampler 24/32 Multi Sample 8” Wafer/Large Holder Sample Holder Rotatable and translatable (x-phi) sample holder that mounts on the UMA rotational stage Allows rotation and translation of sample(s) for both T and R measurements at angle – multi-sample or “mapping” Spatial resolution dictat
Slide 24: Reflectance Measurement on UMA
Reflectance Measurement on UMA Agilent Restricted 24 April 20, 2017
Slide 25: Transmission Measurement on UMA
Transmission Measurement on UMA Agilent Restricted 25 April 20, 2017
Slide 26: Absorptance Measurement on UMA
Absorptance Measurement on UMA Agilent Restricted 26 April 20, 2017
Slide 27: Advanced Measurement Capabilities
Advanced Measurement Capabilities Agilent Restricted 27 April 20, 2017
Slide 28: Absolute Specular Reflection
Absolute Specular Reflection Summary Measurement of absolute specular reflectance of a SRM traceable to a NIST standard. Results In this figure the measured and certified spectra have been are overlaid Comparisons between measured value and certified value can be seen to correspond very closely acro
Slide 29: Absolute Specular Reflection
Absolute Specular Reflection Application Coating characterization and design validation. Comprehensive angular, and wavelength range, analysis of a coated silicon substrate, 200 mm diameter, 800 mm thickness. Challenge Efficient and accurate thin film design measurement by multi-angle, UV-Vis-NR spe
Slide 30: Thin Film/Coatings, Specular Reflectance
Thin Film/Coatings, Specular Reflectance Results Absolute specular reflectance measured of a coated silicon substrate in the UV-Vis-NIR from near normal angles of incidence (AOI) to high grazing angles. Spectra with AOI from 6 deg to 86 deg in 1 deg increments are shown for p-polarized light. The en
Slide 31: Thin Film/Coatings, Specular Reflectance
Thin Film/Coatings, Specular Reflectance Results A 2D contour plot of the previous slide helps visualize the coating dependence with AOI and wavelength and aids with locating reflection minima and maxima, e.g., minimum reflection can easily identified at 1500 nm with 70 deg AOI. Agilent Restricted 3
Slide 32: Example of AR Sample
Example of ar Sample Agilent Restricted 32 April 20, 2017
Slide 33: AR Coating Near Normal Expanded
ar Coating Near Normal Expanded Agilent Restricted 33 April 20, 2017
Slide 34: Optics – Cube Beamsplitters
Optics – Cube Beamsplitters Application Example Polarizing CBS use in interferometer of nano- positioning system. Designed for HeNe laser @ 632.8 nm. Proprietary beamsplitter & anti-reflection coating made from TiO2 & SiO2. The two prisms are bonded with optical adhesive. The Challenge Measure T and
Slide 35: Optics – Cube Beamsplitters
Optics – Cube Beamsplitters Results S-polarized spectra (left) desire High Rs and Low Ts. P-polarized spectra (right) desire High Tp and Low Rp. Performance is easily determined. Results can be fed back into CBS design.
Slide 36: RGB Cube Prism
RGB Cube Prism Agilent Restricted 36 April 20, 2017
Slide 37: RGB Cube Prism
RGB Cube Prism Agilent Restricted 37 April 20, 2017
Slide 38: RGB Cube Prism
RGB Cube Prism Agilent Restricted 38 April 20, 2017
Slide 39: RGB Cube Prism
RGB Cube Prism Agilent Restricted 39 April 20, 2017
Slide 40: RGB Cube Prism Overlay of Data
RGB Cube Prism Overlay of Data Agilent Restricted 40 April 20, 2017
Slide 41: RGB Cube Prism Effect of Polarization
RGB Cube Prism Effect of Polarization Agilent Restricted 41 April 20, 2017
Slide 42: Measuring Grating Efficiency
Measuring Grating Efficiency Agilent Restricted 42 April 20, 2017
Slide 43: Orientation of Sample
Orientation of Sample Agilent Restricted 43 April 20, 2017
Slide 44: Grating Results
GRATING RESULTS Samples Run : 300 lines per mm 1200 lines per mm 1800 lines per mm 3600 lines per mm Data Collected at a Data Interval of 1 nm and 10 nm Data Collected with SBW of 2 nm and 5 nm Confidentiality Label 44
Slide 45: Grating Sample on Cube Sample Holder
Grating Sample on Cube Sample Holder 300 line per mm Grating on Sample Holder Confidentiality Label 45 April 20, 2017
Slide 46: Grating Sample in UMA
Grating Sample in UMA Detector Held at 10 degrees Sample Stage Rotated to Calculated Angles for Grating and Wavelength which have been read from a csv file Confidentiality Label 46 April 20, 2017
Slide 47: 1200 lines per mm Sample
1200 lines per mm Sample Data Interval 1 nm SBW 2 nm Confidentiality Label 47 April 20, 2017
Slide 48: 1200 lines per mm Grating
1200 lines per mm Grating Data Interval 1 nm SBW 2 nm P-Polarization Confidentiality Label 48 April 20, 2017
Slide 49: 1200 lines per mm Grating
1200 lines per mm Grating Data Interval 1 nm SBW 2 nm S-Polarization Confidentiality Label 49 April 20, 2017
Slide 50: 1200 lines per mm Grating
1200 lines per mm Grating Overlay of S&P Polarization Data Interval 1 nm SBW 2 nm Confidentiality Label 50 April 20, 2017
Slide 51: 1200 lines per mm Grating
1200 lines per mm Grating Overlay of S, P, and Average Polarization Data Interval 1 nm SBW 2 nm Confidentiality Label 51 April 20, 2017
Slide 52: Elapsed Time for Data Collection for 1200 lines per mm Sample
Elapsed Time for Data Collection for 1200 lines per mm Sample 1200 lines per mm P-Polarization Start Time 5:46:57 PM End Time 7:56:59 PM Elapsed Time = 2 hrs 10 min 02 sec 1200 lines per mm S-Polarization Start Time 10:44:27 PM End Time 12:55:53 AM Elapsed Time = 2 hrs 11 min 28 sec Total Elapsed Ti
Slide 53: Comparison of Data Interval of 1 nm and 10 nm
Comparison of Data Interval of 1 nm and 10 nm Sample 1200 lines per mm Confidentiality Label 53 April 20, 2017
Slide 54: 1200 lines per mm Grating
1200 lines per mm Grating Overlay of P-Polarization Data Interval of 1 nm and 10 nm Red data interval = 1 nm Black data interval = 10 nm Confidentiality Label 54 April 20, 2017
Slide 55: 1200 lines per mm Grating
1200 lines per mm Grating Overlay of S-Polarization Data Interval of 1 nm and 10 nm Red data interval = 1 nm Black data interval = 10 nm Confidentiality Label 55 April 20, 2017
Slide 56: Scattered Reflection
Scattered Reflection Lambertian - PTFE
Slide 57: UMA vs DRA
UMA vs DRA DRA detects scattered light in all directions D UMA detects scattered light at one position with a cone angle of 5o Confidentiality Label 57 April 20, 2017
Slide 58: Diffuse Colour Standards
Diffuse Colour Standards Confidentiality Label 58 April 20, 2017
Slide 59: Blue PTFE Colour Standard
BLUE PTFE COLOUR STANDARD UMA, Internal DRA, External DRA All Accessories: • Double Beam Auto Select • UV/Vis o Data Interval = 1 nm o SBW = 4 nm • NIR o Data Interval = 1 nm o Energy = 3 UMA: • SAT = 0.5 s Internal DRA • SAT = 0.1 s External DRA • SAT = 0.1 s Confidentiality Label 59 April 20, 2017
Slide 60: Questions?
The End Thank You for Your Patience Questions? Contact Information : mark.fisher@agilent.com © 2009 PerkinElmer
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