Slide 1: UPW analysis using Agilent 8900 with m lens
UPW analysis using Agilent 8900 with m lens Kazuhiro Sakai Yoshinori Shimamura Agilent Technologies Japan, Ltd. 1 October 7, 2026 DE44369.9217592593
Slide 2: Background: Agilent 8900 with s lens
Background: Agilent 8900 with s lens 8 Tunes = 3 Cool Plasma Tunes + 5 Hot Plasma Tunes = Best Data = Published Dec. 2016 Can we provide a simple method? -> Yes
Slide 3: ASTM and SEMI Standards =UPW=
ASTM and SEMI Standards =UPW= ASTM D5127-13 (2018) SEMI F63-0521 (2021) BEC : < 1 ppt BEC : < 1 ppt (B 50 ppt, Ni 3 ppt) (B: 50 ppt / Ti, V, Mn, Cd, Sn :10 ppt) D.L. : < 0.5 ppt (B 15 ppt, Ni 1.6 ppt) ASTM D5127-13 (2018) BEC < 0.5 ppt SEMI F63-0521 (2021) (most of the elements) BEC : < 1 ppt (B 50
Slide 4: Tuning parameters: 8900 (m lens)
Tuning parameters : 8900 (m lens) No Gas NH3+H2 O2 3 Tunes ： only Hot Plasma condition RF Power 1600 Parameter Description Smpl Depth 8.0 Nebulizer Gas 0.70 Sample Uptake Rate 200 μL/min Makeup Gas 0.48 Extract 1 3.5 4.0 3.0 Nebulizer MFN-100 (standard) Extract 2 -20 -40 -100 Spray Chamber and Torch
Slide 5: BEC (ppt)
BEC 1.5 1.1 ppt SEMI Value (F63-0521) is < 1.0 ppt (B:50 ppt) 1.0 BEC (ppt) 0.5 0.0 Li B Na Mg Al K Ca Ti V Cr Mn Fe Co Ni Cu Zn As Sr Mo Cd Sn Sb Ba W Pt Pb BEC < 0.5 ppt (most of the elements)
Slide 6: D.L. (ppt)
D.L. 1.5 1.2 ppt 1.0 D.L. (ppt) SEMI Value (F63-0521) is < 0.5 ppt (B:15ppt) 0.5 0.0 Li B Na Mg Al K Ca Ti V Cr Mn Fe Co Ni Cu Zn As Sr Mo Cd Sn Sb Ba W Pt Pb D.L. < 0.3 ppt (most of the elements)
Slide 7: Sensitivity and Calibration Curves
Sensitivity and Calibration Curves 11 B [ No Gas ] 40 -> 40 Ca [ NH3+H2 ] x10 2 y = 10.8590 * x + 12.0000 x10 3 y = 104.5226 * x + 39.7000 R = 0.9996 R = 1.0000 5 DL = 1.179 ppt DL = 0.1744 ppt 8900 BEC = 1.105 ppt BEC = 0.3798 ppt CPS CPS 11 CPS /ppt B (no-gas) 0 0 20.0 40.0 20.0 40.0 105 CPS /ppt
Slide 8: UPW (1/1000 HNO3)
UPW (1/1000 HNO3) Tune b Cal 3SD Theo DL Scan Type Q1 Q2 Name R a DL BEC Units DATA/Theo Mode (blank) CPS ppt No Gas Single Quad 7 Li 0.9994 18 0.0 0.00 0.00 ppt 0.0 0.00 #DIV/0! No Gas Single Quad 11 B 0.9996 11 12 1.18 1.11 ppt 10.4 0.96 1.2 No Gas Single Quad 23 Na 0.9992 52 12.1 0.26 0.23 ppt 10
Slide 9: Summary: Target Value vs Our Results
Summary Target Value Our Results Simple Method; achieved 3 tunes only for Hot Plasma Hot Plasma only (3 Tunes) by using m lens BEC : Most of the elements < 0.5ppt SEMI : <1.0 ppt (B: 50 ppt) D.L. : Most of the elements < 0.3ppt SEMI : < 0.5 ppt (B:15ppt) Tips ・ Sample Uptake Rate: about 200 μL/min (
Slide 10: appendix
appendix
Slide 11: m lens related parts
m lens related parts for 8900 for 7900 Pt Sampling cone G3280-67036 ← Pt (Ni base) Skimmer for m-lens G3666-67501 ← Extraction-Omega lens assy with m-lens, brass skimmer base G3666-67500 G8400-67047 Brass Skimmer base G3666-60401 G8400-60634 Extraction 1 lens (m-lens) G3666-60502 ← Extraction 2 lens