Spirox Corporation · TWSE:3055
Spirox — Investor Presentation (September 2026)
24 slides from Spirox's investor presentation, Sep 10, 2026
Slide 1: Spirox Group
Spirox Group Professional Semiconductor Equipment Provider Spirox Confidential
Slide 2: Safe Harbor Notice
Safe Harbor Notice ⚫ This presentation contains "forward-looking statements" and based on our own information and information from other sources we believe to be reliable. Our actual results of operations, financial condition or business prospects may differ materially from those expressed or implie
Slide 3: Agenda
Agenda 01 Spirox Overview and Market Trend 02 Core Technology: SpiroxLTS® and Applications 03 Patent and Certificate 04 Financial Review 05 Q&A Spirox Confidential 3
Slide 4: Agenda
Agenda 01 Spirox Overview and Market Trend 02 Core Technology: SpiroxLTS® and Applications 03 Patent and Certificate 04 Financial Review 05 Q&A Spirox Confidential 4
Slide 5: Overview
Overview Hsinchu, Taiwan │ HQ • Own Products • Semiconductor Equipment Distribution • Optical Technology R&D Center • Power Semiconductor Dynamic Reliability Verification Lab • Board Repair Service Subsidiary Jetek Technology Corp. Southport Corporation • System Integration Services • Advanced Optic
Slide 6: Key Process Flow of Through-Glass Via (TGV) Fabrication
Key Process Flow of Through-Glass Via (TGV) Fabrication 1 2 3 4 Laser Modification Etching Metallization Build-Up Ultra-fast laser pulses Selective chemical Copper electroplating Integration of ABF induce localized etching removes the fills the vias or build-up layers and structural modification las
Slide 7: Key Challenges in Glass Core / TGV Manufacturing
Key Challenges in Glass Core / TGV Manufacturing Key Process Challenges Limitations of Conventional Inspection Tools Glass is inherently transparent and brittle, making • Conventional AOI： defects prone to occur during laser modification, Relies on reflected light imaging and is affected etching, me
Slide 8: Agenda
Agenda 01 Spirox Overview and Market Trend 02 Core Technology: SpiroxLTS® and Applications 03 Patent and Certificate 04 Financial Review 05 Q&A Spirox Confidential 8
Slide 9: Spirox Laser Tomography Scan
Spirox Laser Tomography Scan SpiroxLTS uses non-linear optics technology to non-destructively visualize refractive index discontinuities at internal material interfaces. Linear Optics Non-linear Optics Incident Light Excitation Laser Reflected Light Excited non-linear signal (K1) Material A Material
Slide 10: TGV Manufacturing Process Optimization: Key Role in Process Parameter Optimization
TGV Manufacturing Process Optimization: Key Role in Process Parameter Optimization SP8000G Non-Destructive Laser Laser Modification TGV Etching Metallization Modification Inspection System Modified Beam Profile Morphology and Crack Inspection after SP8002G Dual-Head and Uniformity Inspection Dimensi
Slide 11: TGV Applications: 3D Laser Modification Tomography for Uniformity and Continuity Inspection
TGV Applications: 3D Laser Modification Tomography for Uniformity and Continuity Inspection Fully Inconsistent Partially Consistent Width Discontinuous Slight modification Significant modification shape difference at shape difference at the the Bottom Bottom Spirox Confidential 11
Slide 12: TGV Application: Dynamic Tomogram of Laser Modification
TGV Application: Dynamic Tomogram of Laser Modification It’s able to observe Laser modification variations along the vertical depth changes. Spirox Confidential 12
Slide 13: TGV Applications: Post-Etching Via Profile Measurement
TGV Applications: Post-Etching Via Profile Measurement TCD Vertical Depth of Aperture Changes and Waist Depth Positioning Waist CD BCD 3D Imaging to TGV Profile Vertical cross-section imaging without sample destruction Spirox Confidential 13
Slide 14: TGV Applications: Crack Inspection after Metallization & CMP
TGV Applications: Crack Inspection after Metallization & CMP Crack on OM Voids Cu Glass Abnormal Spirox Confidential 14
Slide 15: TSV Applications: Via Depth Measurement & Bottom Residue Inspection
TSV Applications: Via Depth Measurement & Bottom Residue Inspection SiO2 Residual SiO2 Metal Spirox Confidential 15
Slide 16: Glass Coupler / Glass Bridge Measurement
Glass Coupler / Glass Bridge Measurement Glass-based optical connectors with embedded optical waveguides for chip-to-fiber coupling, enabling Co-Packaged Optics (CPO). 光波導 Source: Corning 300μm 345μm 30μm 30μm Planar Waveguide Channel Source: Corning Waveguide Source: Fiber Mall (Intel’s Pluggable O
Slide 17: Product
Product SP8000G SP8000S Target Process TGV TSV Glass Core Applications TSV, HBM, Memory Glass Coupler/Glass Bridge • Laser Modification: Modified Beam • TSV Profile and Inner Wall Profile and Uniformity Inspection Inspection • TGV Etching: Morphology and • Fast Measurement of TSV Full- Dimensional I
Slide 18: Agenda
Agenda 01 Spirox Overview and Market Trend 02 Core Technology: SpiroxLTS® and Applications 03 Patent and Certificate 04 Financial Review 05 Q&A Spirox Confidential 18
Slide 19: Patents and Certifications
Patents and Certifications • Nearly 50 patent applications filed across the U.S., Europe, Japan, Korea, Taiwan, and China • Registered SpiroxLTS® trademarks in Taiwan, the U.S., and Europe • SP8000G certified with CE Mark and SEMI S2 certification Spirox Confidential 19
Slide 20: 13 Patent Families | 6 Countries | 54 Applications
13 Patent Families | 6 Countries | 54 Applications No. Type Granted Pending Applications Filed 1 Invention Taiwan, Japan, China 3 2 Invention Taiwan 1 3&4 Invention Taiwan Japan, U.S., China 8 5 Invention Taiwan, Japan, U.S., China 4 6&8 Invention Taiwan (#6) Taiwan(#8), Japan, Korea, U.S., Germany,
Slide 21: Agenda
Agenda 01 Spirox Overview and Market Trend 02 Core Technology: SpiroxLTS® and Applications 03 Patent and Certificate 04 Financial Review 05 Q&A Spirox Confidential 21
Slide 22: Consolidated Financial Information Summary (YoY)
Consolidated Financial Information Summary (YoY) ●The Gross Profit Margin for the first half of 2026 was 31.77%, which was nearly 11 percentage points higher than the same period last year. This was mainly due to the fact that the revenue in April included the SP8000S non-destructive TSV inspection
Slide 23: Agenda
Agenda 01 Spirox Overview and Market Trend 02 Core Technology: SpiroxLTS® and Applications 03 Patent and Certificate 04 Financial Review 05 Q&A Spirox Confidential 23
Slide 24: Thank you.
Thank you. Spirox Confidential