Slide 1: Applying Artificial Intelligence in Fab Technology Co-Optimization
Applying Artificial Intelligence in Fab Technology Co-Optimization
Slide 2: Silvaco At A Glance
Silvaco At A Glance Enabling semiconductor innovation from atoms to systems Silvaco Leadership Design, Simulate, Analyze, and Verify from Concept to Complete Product Yield 600+ Customers ATOMS T 200+ 260+ R University Customers Employees AN MS SI TCAD AT O S TO Global Presence TCAD EDA R TS RANSITOR
Slide 3: From Atoms To Systems Platform
From Atoms To Systems Platform Foundation Interface IP Systems IP IP Management Circuits Design Technology Co-Optimization (DTCO) Silvaco SIP Devices Fab Technology Co-Optimization (FTCO ) Processes Silvaco EDA Silvaco TCAD Atoms Copyright │ ©2024 Silvaco, Inc. 3
Slide 4: Victory TCAD Platform
Victory TCAD Platform Develop semiconductor processes and devices prior to and during manufacturing VICO T RY T CAD PLAT FO RM → Model and simulate the manufacturing process Process Device Model → Model and simulate semiconductor and photonic device behavior Process Simulation Device Simulation Mode
Slide 5: Motivation for Application of AI in Fab Process Optimization
Motivation for Application of AI in Fab Process Optimization Problem Consequences Solution • Fabs are getting more complex • Traditional methods of optimizing • Application of Digital Twin fab processes is slow • Running DoE with wafers to technology and AI to accelerate optimize fabs not scaling •
Slide 6: Four Levels of AI in EDA Industry
Four Levels of AI in EDA Industry Self-Optimizing Tools Design Assistant Generative Design Fab Assistant el d Yi Improve Performance of Build Foundation Models Expand Assistant Build Digital Twin of Fab Existing Design Tools From Design Experience Capabilities Process • Training for specific • Machi
Slide 7: Digital Twin
Digital Twin A physics-based digital counterpart that mirrors the form, fit and function of the physical world “Digital Twin” concept was introduced over 20 years ago as a product Lifecycle Management (PLM) concept. Real World Digital Twin • A Digital Twin is a virtual representation of complex real
Slide 8: Exploring The Digital Twin Concept with TCAD
Exploring The Digital Twin Concept with TCAD • Silvaco’s physics-based simulators virtualizes semiconductor and photonics manufacturing and device characterization • Allows organizations to maintain a “digital twin” of their semiconductor process and devices DRAM Process Flow • Accurate digital twin
Slide 9: Silvaco's Machine Learning Accelerates Semiconductor Digital Twin Development
Silvaco’s Machine Learning Accelerates Semiconductor Digital Twin Development Sampling & Data Mining, AI-Driven AI-Based Optimized Digital Twin Analysis, Nonlinear Data Generation Visualization Modeling Digital Twin Model • Real Fab/Electrical Data and Physics-Based Simulation generates training dat
Slide 10: Silvaco's AI-Driven Fab Technology Co-Optimization (FTCO)
Silvaco’s AI-Driven Fab Technology Co-Optimization (FTCO 1 ) Removing cost of trial-and-error using AI-driven models through digital twins → AI customizes solutions for fabs automatically → Broad application in the semiconductor processes • CMOS, SiC, GaN, Memory AI-Optimized Sampling & Data Data Mi
Slide 11: FTCO Solution Platform
FTCO Solution Platform Tool Components ML/AI Analysis Tools Victory Analytics • Machine Learning analytics solution designed for the semiconductor industry. Tool is comprised of data visualization, input feature selection and data training, modeling, optimization and DOE. Interactive DoE Environment
Slide 12: FTCO Development Partnership with Micron
FTCO Development Partnership with Micron “ Micron is excited to strengthen our partnership with Silvaco. Silvaco’s AI and digital twin solution is enabling us to accelerate our groundbreaking advancements in memory and storage.” Dr. Gurtej Sandhu Principal fellow of Technology Pathfinding Micron Tec
Slide 13: FTCO Summary
FTCO Summary • The growing fab complexity requires a new approach to process optimization • We have combined our deep TCAD expertise and semiconductor knowledge with AI to develop a unique platform for fab process optimization • We partnered with Micron Technology for the development of FTCO Platfor
Slide 14: Thank you.
Thank you. Copyright │ ©2024 Silvaco, Inc.