Silvaco Group, Inc. · NASDAQ:SVCO

Silvaco — Technical Presentation (2022)

15 slides from Silvaco's technical presentation, Sep 7, 2022

1. Slide 1: Victory RCx Pro: Physics-Based Parasitic Extraction Application Examples

   Victory RCx Pro: Physics-Based Parasitic Extraction Application Examples

2. Slide 2: Exclusive NOR Cell Application

   Exclusive NOR Cell Application Accurate parasitic extraction for an exclusive NOR cell requires realistic interconnect geometries. Copyright ©2022 Silvaco, Inc. 2

3. Slide 3: Exclusive NOR Cell Application (con't)

   Exclusive NOR Cell Application (con’t) Original GDS-II layout of exclusive NOR cell. Node labels are read from GDS-II file. Copyright ©2022 Silvaco, Inc. 3

4. Slide 4: Exclusive NOR Cell Application (con't)

   Exclusive NOR Cell Application (con’t) Accurate parasitic extraction for an exclusive NOR cell requires realistic interconnect geometries. Copyright ©2022 Silvaco, Inc. 4

5. Slide 5: Exclusive NOR Cell Application (con't)

   Exclusive NOR Cell Application (con’t) EXNOR layout annotated with internal node locations. The internal nodes are used for back-annotation to the netlist. Copyright ©2022 Silvaco, Inc. 5

6. Slide 6: Exclusive NOR Cell Application (con't)

   Exclusive NOR Cell Application (con’t) EXNOR layout annotated with internal node locations. The internal nodes are used for back-annotation to the netlist. Copyright ©2022 Silvaco, Inc. 6

7. Slide 7: Exclusive NOR Cell Application (con't)

   Exclusive NOR Cell Application (con’t) SPICE simulation showing the effect of interconnect parasitics on timing of the EXNOR cell. Copyright ©2022 Silvaco, Inc. 7

8. Slide 8: CMOS Inverter Application

   CMOS Inverter Application CMOS inverter layout used to compare different interconnect geometry models. Copyright ©2022 Silvaco, Inc. 8

9. Slide 9: CMOS Inverter Application (con't)

   CMOS Inverter Application (con’t) Effect of using idealized geometries vs. realistic interconnect process simulation on ring oscillator gate delay. Copyright ©2022 Silvaco, Inc. 9

10. Slide 10: CMOS Inverter Application (con't)

    CMOS Inverter Application (con’t) Metal serpentine used to examine metal width effects. Copyright ©2022 Silvaco, Inc. 10

11. Slide 11: CMOS Inverter Application (con't)

    CMOS Inverter Application (con’t) Effects of different metal widths on inverter’s gate delay are plotted. Copyright ©2022 Silvaco, Inc. 11

12. Slide 12: CMOS Inverter Application (con't)

    CMOS Inverter Application (con’t) Simulation of Aluminum Dual Damascene process with nitride etch stops. Victory RCx Pro can handle arbitrary process complexity. Copyright ©2022 Silvaco, Inc. 12

13. Slide 13: SRAM Application

    SRAM Application SRAM cell with 4 metal layers plus polysilicon. Each metal layer is composed of multiple material layers which are correctly modeled by Victory RCx Pro for accurate resistance extraction. Copyright ©2022 Silvaco, Inc. 13

14. Slide 14: SRAM Application (con't)

    SRAM Application (con’t) Lithography effect on Metal 1 geometry of an SRAM cell. Significant differences in metal geometry versus an idealized case are seen affecting both capacitance and resistance. Copyright ©2022 Silvaco, Inc. 14

15. Slide 15: Conclusion

    Conclusion • Victory RCx Pro can be used to examine and optimize interconnect processing and layout effects on circuit timing for any arbitrary small cells • Full photolithographic and 3D processing capability coupled with the use of field solvers results in the highest possible accuracy for cell le

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