Silvaco Group, Inc. · NASDAQ:SVCO
Silvaco — Technical Presentation (2023)
11 slides from Silvaco's technical presentation, Jan 13, 2023
Slide 1: DTCO Integrated Tool Flow
DTCO Integrated Tool Flow Single Run Time Environment
Slide 2: Contents
Contents • Introduction • Select Cell Layout and Annotate using Rule File • Clip Layout to Build Active Devices • Device Simulation and SPICE Model Extraction • 3D BEOL Structure Creation for RCX Field Solver • SPICE Simulation within Same Input File • DTCO Statistical Analysis Environment • Summary
Slide 3: Introduction: DTCO Connecting Semiconductor Physics to Circuit Design
Introduction DTCO: Connecting Semiconductor Physics to Circuit Design Process Simulation Modeling Device Simulation Solid Modeling Circuit Simulation & RCx Victory Process Victory Device Utmost IV • Etch & Deposition • Drift/Diffusion • SPICE Model Generation • Epitaxy • Self-Heating Design • Implan
Slide 4: Introduction
Introduction • Design Technology Co Optimization (DTCO) improves designs across multiple domains. • 3D active device and BEOL parasitic extraction builders are now integrated and share the same: – Layout tool – Structure builder – Structure mesh generator – Rule file – Simulation interface – Syntax
Slide 5: Select Cell and Annotate using Rule File
Select Cell and Annotate using Rule File • Supplied layout with basic labels ( Vss , Vdd , In, • Layout automatically annotated using the rule file Example using a ring oscillator circuit ©2023 Silvaco, Inc. 5
Slide 6: Clip Layout to Build Active Devices
Clip Layout to Build Active Devices • From same layout, clip areas to build active devices • Full Victory Process simulation capability available • Variables are used to automatically mesh the active structures Example of stained SiGe extensions for pMOS ©2023 Silvaco, Inc. 6
Slide 7: Device Simulation and SPICE Model Extraction
Device Simulation and SPICE Model Extraction • Simulate active device I V and capacitance curves • Automated multi gate SPICE model extraction ©2023 Silvaco, Inc. 7
Slide 8: 3D BEOL Structure for RCX Field Solver
3D BEOL Structure for RCX Field Solver • A Full 3D structure is created for BEOL field solver • Active device netlist automatically extracted, then • RC parasitics extracted and automatically back annotated • Same structure builder/syntax as used for active devices ©2023 Silvaco, Inc. 8
Slide 9: SPICE Simulation within Same Input File
SPICE Simulation within Same Input File • Use “.INCLUDE” statement in SPICE to import created netlist • SPICE simulations run and key performance parameters extracted for full flow optimization • All run using the same interface and script ©2023 Silvaco, Inc. 9
Slide 10: DTCO Statistical Analysis Environment
DTCO Statistical Analysis Environment • Design of Experiments and analysis environment • Statistical analysis of layout/process/circuit dependencies ©2023 Silvaco, Inc. 10
Slide 11: Summary
Summary • Single fully integrated run time environment • Anything can be a variable Layout, Process, BEOL • Clear actionable results for Design Optimization • Complete and full TCAD to SPICE simulation capability • Parameterization models linking all design variables • Powerful extract statements fo