Ebara Corporation · TSE:6361
Ebara — Investor Day (December 2023)
18 slides from Ebara's investor day presentation, Dec 5, 2023
Slide 1: Summary Explanation of Automated Plant "V7"
EBARA IR Day 2023＜Day 2＞ Precision Machinery Company Dry vacuum pump automated plant tour Summary Explanation of Automated Plant ”V7“ December 5, 2023
Slide 2: Table of Contents
Table of Contents 1. Introduction 2. Automated Plant V7 Overview 1 Copyright(c) Ebara Corporation, All rights reserved
Slide 3: 1. Introduction
1. Introduction 2 Copyright(c) Ebara Corporation, All rights reserved
Slide 4: Major Domestic Locations
Haneda Head Office & Precision Machinery Company Major Domestic Locations Fujisawa District, EBARA Corporation Haneda Kanagawa Prefecture Head Office, Tokyo Precision Machinery Company Company Head Office Functions Component product design, development, Kumamoto District, Kumamoto Prefecture product
Slide 5: Fujisawa District Overview
Fujisawa District Overview [Overview] Address: 4-2-1 Honfujisawa, Fujisawa-shi, Kanagawa Precision Machinery Building Service and Lot: 372,703 m2 Company Industrial Company Employees: over 3,000 Corporate [History] V6 1965: Opening Started with Standard Pumps Business (P1 Building) and Chillers P3 V
Slide 6: Precision, Fujisawa Plant Production Lineup
Precision, Fujisawa Plant Production Lineup Component products Semiconductor manufacturing Dry vacuum pumps Gas Abatement Systems Integrated dry vacuum equipment products Combustion/Dry bed/Fluorine pump/gas abatement systems CMP (Model: F-REX*) captured ✓Energy saving ✓Temperature control ✓Harmony
Slide 7: Installation Environment for Components Business Products inside Semiconductor Factories
Installation Environment for Components Business Products inside Semiconductor Factories ◼ Vacuum products that create a vacuum environment in semiconductor manufacturing equipment and products that detoxify process gases ◼ Supplies ozone water for the cooling chillers and wafer cleaning systems of
Slide 8: About Dry Vacuum Pumps
About Dry Vacuum Pumps Exhausts gases (toxic and corrosive) used in semiconductor processes to create a clean space World No. 2 share Total shipments from Fujisawa reached 200,000 units Also used in manufacturing LED and solar panels 7 Copyright(c) Ebara Corporation, All rights reserved
Slide 9: Automated Plant Construction Background
Automated Plant Construction Background (1) Increase production capacity to respond to market growth and higher market share Demand for semiconductor manufacturing equipment is increasing with semiconductor market growth demand for dry vacuum pumps, which are essential at semiconductor manufacturing
Slide 10: 2. Automated Plant V7 Overview
2. Automated Plant V7 Overview 9 Copyright(c) Ebara Corporation, All rights reserved
Slide 11: Automated Plant "V7" Plant Overview
Automated Plant ”V7“ Plant Overview Building surface area: Approx. 18,000m2 Total floor area: Approx. 42,000m2 Height: 4 floors History: March 2018: Concept evaluation started January 2019: Construction started December 2019: Construction completed March 2020: Production started Features: Automation
Slide 12: Automated Plant "V7" Plant Overview: Logistics automation
Automated Plant ”V7“ Plant Overview Logistics automation • Using 40,000 RFID tags to ensure the information of parts • Incorporating the latest digital picking system and projection picking system to streamline picking work 11 Copyright(c) Ebara Corporation, All rights reserved
Slide 13: Automated Plant "V7" Plant Overview: Automation of processing
Automated Plant ”V7“ Plant Overview Automation of processing • Using robots and AGV* to automate the transportation of parts between processing machines • Adopted a vision system to automate material handling • Automated serial number engraving *Automatic Guided Vehicle (AGV): An unmanned guided veh
Slide 14: Automated Plant "V7" Plant Overview: Assembly automation
Automated Plant ”V7“ Plant Overview Assembly automation • Automated assembly of pump modules* • Achieved by optimally combining cutting-edge automation equipment such as robots, nutrunners, and vision systems *Pump module (A unit that creates a vacuum) 13 Copyright(c) Ebara Corporation, All rights r
Slide 15: Innovate Internal Systems
Innovate Internal Systems Innovating internal systems to efficiently operate automated equipment • Built a "production planning optimization system" that uses AI to automatically draw up production plans • Renovated MES to send necessary information to automated equipment at the required timing • Au
Slide 16: Benefits of Operating Automated Plants
Benefits of Operating Automated Plants Number of personnel: 10% reduction Production capacity: Doubled Environmental impact: Coating usage: Reduced by 20% Solar power generation: Covers 10% V7 power (Power generation started on November 29, 2023) 15 Copyright(c) Ebara Corporation, All rights reserve
Slide 17: Introduction of Automated Plant "V7"
Introduction of Automated Plant ”V7“ YouTube: Ebara dry vacuum pump automated assembly plant "V7" https://www.youtube.com/watch?v=Un6YXHco_9k Ebara Engineering Review: Introduction of a New Factory for Dry Vacuum Pumps (Japanese language only) https://www.ebara.co.jp/jihou/no/list/detail/265-3.html
Slide 18: Disclaimer
Disclaimer: This release contains forward-looking statements which involve certain risks and uncertainties that could cause actual results to differ materially from those projected. Readers are cautioned not to place undue reliance on these forward-looking statements which are valid only as of the d