The Center opened in
Purpose of Establishment
The Center serves as a hub for co-creation and collaboration with
Through these partnerships, the Center aims to advance next-generation semiconductor manufacturing technologies, expand application domains, accelerate the resolution of customer challenges, strengthen partnerships, and create new business opportunities.
Overview of the Semiconductor Subsystems and Components R&D Center
The Center is equipped with a very low-vibration cleanroom designed to facilitate joint research and development. It provides the cleanliness and vibration control required for evaluating precision stages and robotics performance, enabling on-site verification of advanced technologies such as nanometer-level positioning evaluation and dynamic characteristic analysis for next-generation semiconductor manufacturing equipment.
This environment allows collaborative product development and evaluation with
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