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Nova Unveils Next Generation Integrated Metrology Solutions
REHOVOT, Israel, July 27, 2020 /PRNewswire/ -- Nova (Nasdaq: NVMI) announced today two break-through Integrated Metrology solutions, reinforcing the company's
About this update from Nova Ltd.
[{"type":"text","content":"REHOVOT, Israel, July 27, 2020 /PRNewswire/ -- Nova (Nasdaq: NVMI) announced today two break-through Integrated Metrology solutions, reinforcing the company's Optical CD portfolio technology leadership. The new platforms, Nova i570 HP and Nova ASTERA, will enhance Nova's ability to support customers in the most advanced Memory and Logic nodes. The new portfolio will strengthen Nova's partnerships with its customers for the development and manufacturing of next- generation IC architectures. \nThe continuous efforts to scale chips' performance create multiple process complexities, growing challenges in development time and difficulties in yield building. To meet the demand for tighter specs and smaller process windows, IC manufacturers require solutions that provide better metrology performance and reduce the overall measurement uncertainty. The ever-growing fabrication complexity dictates the need to measure in-die with minimal within-wafer and within-die variation. Furthermore, measuring in-die, requires even more accurate solutions, which traditional integrated metrology solutions cannot provide. \nThe Nova ASTERA platform is a first of a kind in the industry, providing stand-alone level performance in a compact form factor of integrated metrology. The new platform utilizes multi-channel measurements, providing the best solution in the market in terms of accuracy, precision, tool-to-tool matching and extendibility. The platform brings unmatched capability to the world of integrated metrology, enabling robust measurement for challenging OCD applications in DRAM, 3DNAND and Logic. Nova ASTERA offers the fastest available application time-to-solution, utilizing advanced physical and machine learning algorithms. The platform's rich spectral information content provides the necessary sensitivity for solving complex 3D Optical CD applications that require monitoring growing number of parameters. Nova ASTERA is targeted to support the development of the most advanced device technologies, beyond 3nm Logic and 256 Layers, multi-deck 3D-NAND nodes, and as such, is expected to enter the market over the course of the coming years. \nThe Nova i570 HP normal channel SR platform is the embodiment of Nova's mission, as the Integrated Metrology market leader, to provide the highest performance platform for high volume manufacturing fabs. The ne...