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Axcelis Technologies Announces CEO Succession

Russell J. Low, Ph.D. to Become President and CEO and Mary G. Puma to Become Executive Chairperson Effective May 11, 2023 BEVERLY, Mass., March 27, 2023

articleAxcelis Technologies, Inc.March 27, 20235/company/axcelis-technologies-inc/news/axcelis-technologies-announces-ceo-succession-2023-03-27
Axcelis Technologies Announces CEO Succession

About this update from Axcelis Technologies, Inc.

[{"type":"text","content":"Russell J. Low, Ph.D. to Become President and CEO and Mary G. Puma to Become Executive Chairperson Effective May 11, 2023\nBEVERLY, Mass., March 27, 2023 /PRNewswire/ -- The Board of Directors of Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, today named Russell J. Low, Ph.D. to succeed Mary G. Puma as President and Chief Executive Officer effective May 11, 2023, the date of the Company's 2023 Annual Meeting of Stockholders. Dr. Low is expected to join the Board of Directors on the same date. Ms. Puma will serve as Executive Chairperson of the Board until the 2024 Annual Meeting and remain as a Senior Advisor for a period beyond that. Jorge Titinger, an independent member of the Axcelis Board, will serve as Lead Director during Ms. Puma's tenure as Executive Chairperson.\n\n \n \n \n \n \n \n\n \nRussell J. Low, Ph.D. to Become Axcelis President and CEO Effective May 11, 2023Dr. Low is currently the Company's Executive Vice President, Global Customer Operations and Engineering. During his seven years with Axcelis, Dr. Low has been instrumental in developing and launching Axcelis' expanding Purion ion implant product line, including its very successful Purion Power Series. Prior to this, Dr. Low held various management positions in the semiconductor equipment industry with Veeco, Applied Materials and Varian Semiconductor. He received his Ph.D. in Physical Chemistry from Oxford University, an Executive MBA from the Massachusetts Institute of Technology, and a BS degree from Southampton University. \nMs. Puma has had a 25 year career at Axcelis, with 22 years as CEO. She came to Axcelis through Eaton Corporation, and after assisting with the Company's initial public offering in 2000, became President and Chief Operating Officer. She also served as Axcelis' Chairperson from 2005 through 2015. Prior to joining Eaton, Ms. Puma spent 15 years in various marketing and general management positions for General Electric Company. Ms. Puma is also a director of Nordson Corporation and serves as a director and Chairperson of SEMI, a global industry association serving the manufacturing supply chain for the micro– and nano–electronics industries.\n\"Mary has worked diligently and effectively with her team to strengthen the company and position it for future ...

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