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Advanced Energy Launches MAXstream RPS Product Line for Chamber Clean Applications
Extending AE’s leadership in process power, this new line of Remote Plasma Sources delivers reliable performance at a broad range of flow rates, increasing
About this update from Advanced Energy Industries, Inc.
[{"type":"text","content":"\nExtending AE’s leadership in process power, this new line of Remote Plasma Sources delivers reliable performance at a broad range of flow rates, increasing productivity in semiconductor process equipment\n\n DENVER--(BUSINESS WIRE)--\nAdvanced Energy (Nasdaq: AEIS) – a global leader in highly engineered, precision power conversion, measurement, and control solutions – today announced the launch of its new MAXstream™ remote plasma source (RPS) product line for plasma cleaning of process chambers used in semiconductor device manufacturing. With offerings available across a broad operating range, the MAXstream line delivers higher power accuracy, best-in-class plasma ignition and increased reliability, making it the most capable RPS solution in the market.\nThis press release features multimedia. View the full release here: https://www.businesswire.com/news/home/20201210005878/en/Advanced Energy's new MAXstreamTM product line delivers higher power accuracy, best-in-class plasma ignition and increased reliability, making it the most capable remote plasma source solution in the market (Photo: Business Wire)\n“When customers invited AE to step in and help meet the industry’s need for a high performance and reliable RPS, we made it happen,” said Advanced Energy Vice President and General Manager, Semiconductor Products, Peter Gillespie. “Not only does the new MAXstream product line provide a cost-effective and reliable RPS solution for customers’ process tools, but it also accelerates AE’s penetration to the approximately $150 million per year RPS market, which has seen little innovation in recent years 1. We are encouraged by the positive responses we have received so far and anticipate further success as we continue shipments to multiple OEM customers this month.”\n\nMAXstream delivers substantial improvements over competitors’ RPS solutions. Its dual ignition core design delivers best-in-class plasma ignition reliability. The reliable and strike-every-time ignition means more consistent operation and less downtime. MAXstream also leverages AE’s proven and differentiated plasma source materials and technology to ensure long chamber life and low particle generation.\n\nAE’s MAXstream RPS products facilitate drop-in compatibility with existing RPS systems to enable simple design-in compatibility as well as seamless field upgrades. By...